Inventor · disambiguated record
Travis R. Taylor
Also filed as: TAYLOR TRAVIS · TAYLOR TRAVIS R · TAYLOR TRAVIS ROBERT
18 granted patents·8 pending applications·309 citations·filing 2001–2022
94Inventor score
Files withLAM RES CORP22DE LA LLERA ANTHONY1KANG MICHAEL S1TAYLOR TRAVIS R1W E T AUTOMOTIVE SYSTEMS LTD1
Top patents by PatentIndex Score
26 records- 0193US8622021B2High lifetime consumable silicon nitride-silicon dioxide plasma processing componentsTAYLOR TRAVIS R·Filed 2008·Granted Jan 7, 2014·172 cites·8 claims
- 0282US9335248B1Systems and methods for quantifying particle performance in a substrate processing systemLAM RES CORP·Filed 2015·Granted May 10, 2016·2 cites·29 claims
- 0381US8883029B2Method of making a gas distribution member for a plasma processing chamberLAM RES CORP·Filed 2013·Granted Nov 11, 2014·4 cites·15 claims
- 0479US7004825B1Apparatus and associated method for conditioning in chemical mechanical planarizationLAM RES CORP·Filed 2003·Granted Feb 28, 2006·20 cites·12 claims
- 0578US6769970B1Fluid venting platen for optimizing wafer polishingLAM RES CORP·Filed 2002·Granted Aug 3, 2004·19 cites·30 claims
- 0674US9953825B2Symmetric RF return path linerLAM RES CORP·Filed 2012·Granted Apr 24, 2018·5 cites·15 claims
- 0774US6712679B2Platen assembly having a topographically altered platen surfaceLAM RES CORP·Filed 2001·Granted Mar 30, 2004·18 cites·40 claims
- 0870US8845856B2Edge ring assembly for plasma etching chambersKANG MICHAEL S·Filed 2010·Granted Sep 30, 2014·3 cites·6 claims
- 0970US7153182B1System and method for in situ characterization and maintenance of polishing pad smoothness in chemical mechanical polishingLAM RES CORP·Filed 2004·Granted Dec 26, 2006·13 cites·7 claims
- 1069US6790128B1Fluid conserving platen for optimizing edge polishingLAM RES CORP·Filed 2002·Granted Sep 14, 2004·13 cites·21 claims
- 1167US9076826B2Plasma confinement ring assembly for plasma processing chambersDE LA LLERA ANTHONY·Filed 2011·Granted Jul 7, 2015·2 cites·23 claims
- 1267US6752898B1Method and apparatus for an air bearing platen with raised topographyLAM RES CORP·Filed 2002·Granted Jun 22, 2004·11 cites·14 claims
- 1360US6887338B1300 mm platen and belt configurationLAM RES CORP·Filed 2002·Granted May 3, 2005·8 cites·15 claims
- 1458US6666755B1Belt wiper for a chemical mechanical planarization systemLAM RES CORP·Filed 2002·Granted Dec 23, 2003·9 cites·18 claims
- 1556US6991512B2Apparatus for edge polishing uniformity controlLAM RES CORP·Filed 2001·Granted Jan 31, 2006·5 cites·6 claims
- 1654US7025660B2Assembly and method for generating a hydrodynamic air bearingLAM RES CORP·Filed 2003·Granted Apr 11, 2006·5 cites·30 claims
- 1754US2014367047A1Edge ring assembly for plasma etching chambersLAM RES CORP·Filed 2014·Application pending·0 cites
- 1854US2025093890A1Composition mixture control of efem environmentLAM RES CORP·Filed 2022·Application pending·0 cites
- 1954US2015024582A1Method of making a gas distribution member for a plasma processing chamberLAM RES CORP·Filed 2014·Application pending·0 cites
- 2050US2014113453A1Tungsten carbide coated metal component of a plasma reactor chamber and method of coatingLAM RES CORP·Filed 2012·Application pending·0 cites
- 2141US12094739B2Autoclean for load locks in substrate processing systemsLAM RES CORP·Filed 2020·Granted Sep 17, 2024·0 cites·24 claims
- 2241US2013068748A1Method and apparatus for providing heat to a region around a holeW E T AUTOMOTIVE SYSTEMS LTD·Filed 2012·Application pending·0 cites
- 2340US2018311707A1In situ clean using high vapor pressure aerosolsLAM RES CORP·Filed 2018·Application pending·0 cites
- 2439US2014127911A1Palladium plated aluminum component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2012·Application pending·0 cites
- 2533US2016233114A1Chambers for particle reduction in substrate processing systemsLAM RES CORP·Filed 2015·Application pending·0 cites
- 2628US10903065B2Halogen removal module and associated systems and methodsLAM RES CORP·Filed 2017·Granted Jan 26, 2021·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →