Inventor · disambiguated record
Tsuyoshi Aso
Also filed as: ASO TSUYOSHI
3 granted patents·10 citations·filing 1992–2010
61Inventor score
Top patents by PatentIndex Score
3 records- 0158US8574447B2Inorganic rapid alternating process for silicon etchASO TSUYOSHI·Filed 2010·Granted Nov 5, 2013·2 cites·20 claims
- 0242US7226869B2Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processingLAM RES CORP·Filed 2004·Granted Jun 5, 2007·1 cites·38 claims
- 0328US5151768ADielectric isolation substrateOKI ELECTRIC IND CO LTD·Filed 1992·Granted Sep 29, 1992·7 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →