Inventor · disambiguated record
Tsung-Chih Chien
Also filed as: CHIEN TSUNG-CHIH
15 granted patents·1 pending application·6 citations·filing 2007–2024
86Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD13CHANG CHING-YU1CHIEN TSUNG-CHIH1TAIWAN SEMICONDUCTOR MFG1
Top patents by PatentIndex Score
16 records- 0191US11275301B2Extreme ultraviolet mask and method of manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 15, 2022·3 cites·20 claims
- 0289US11774844B2Extreme ultraviolet mask and method of manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 3, 2023·1 cites·20 claims
- 0387US2025093764A1Extreme ultraviolet maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0484US12181791B2Extreme ultraviolet mask and method of manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 31, 2024·0 cites·20 claims
- 0583US12216399B2Method of manufacturing semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Feb 4, 2025·0 cites·20 claims
- 0680US11940727B2Reticle enclosure for lithography systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 26, 2024·0 cites·20 claims
- 0777US11614683B2Reticle enclosure for lithography systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 28, 2023·0 cites·20 claims
- 0876US12066765B2Operating method for preventing photomask particulate contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 0974US9390891B2Apparatus for charged particle lithography systemTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Jul 12, 2016·2 cites·20 claims
- 1072US11415879B1Reticle enclosure for lithography systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 16, 2022·0 cites·20 claims
- 1162US11506985B2Semiconductor apparatus and method of operating the same for preventing photomask particulate contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 22, 2022·0 cites·20 claims
- 1261US10824080B2Method to reduce native defect printabilityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 3, 2020·0 cites·20 claims
- 1357US9911575B2Apparatus for charged particle lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Mar 6, 2018·0 cites·20 claims
- 1448US8101340B2Method of inhibiting photoresist pattern collapseCHANG CHING-YU·Filed 2007·Granted Jan 24, 2012·0 cites·20 claims
- 1540US9633958B2Bonding pad surface damage reduction in a formation of digital pattern generatorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 25, 2017·0 cites·20 claims
- 1633US8625076B2Wafer edge exposure moduleCHIEN TSUNG-CHIH·Filed 2010·Granted Jan 7, 2014·0 cites·15 claims
Join the waitlist — get patent alerts
Get an alert when Tsung-Chih Chien files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →