Inventor · disambiguated record
Tsu-Yu Chu
Also filed as: CHU TSU-YU
6 granted patents·37 citations·filing 1997–2006
78Inventor score
Top patents by PatentIndex Score
6 records- 0167US6346366B1Method for making an advanced guard ring for stacked film using a novel mask designTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Feb 12, 2002·19 cites·18 claims
- 0244US6396567B1Method and apparatus for controlling the dose of radiations applied to a semiconductor wafer during photolithographyTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted May 28, 2002·10 cites·13 claims
- 0341US7344963B2Method of reducing charging damage to integrated circuits during semiconductor manufacturingUNITED MICROELECTRONICS CORP·Filed 2006·Granted Mar 18, 2008·0 cites·7 claims
- 0439US7537865B2Method of adjusting size of photomask patternUNITED MICROELECTRONICS CORP·Filed 2006·Granted May 26, 2009·0 cites·4 claims
- 0538US5843600AUse of sub divided pattern for alignment mark recovery after inter-level dielectric planarizationTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Dec 1, 1998·7 cites·13 claims
- 0629US5902707AMask containing alignment mark protection patternTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted May 11, 1999·1 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →