Inventor · disambiguated record
Tseh-Jen Hsieh
Also filed as: HSIEH TSEH-JEN
24 granted patents·8 pending applications·37 citations·filing 2010–2024
92Inventor score
Top patents by PatentIndex Score
32 records- 0197US11170967B2Liquid metal ion sourceAXCELIS TECH INC·Filed 2020·Granted Nov 9, 2021·9 cites·20 claims
- 0297US11127557B1Ion source with single-slot tubular cathodeAPPLIED MATERIALS INC·Filed 2020·Granted Sep 21, 2021·5 cites·20 claims
- 0387US9543110B2Reduced trace metals contamination ion source for an ion implantation systemAXCELIS TECH INC·Filed 2013·Granted Jan 10, 2017·8 cites·9 claims
- 0482US10676370B2Hydrogen co-gas when using aluminum iodide as an ion source materialAXCELIS TECH INC·Filed 2018·Granted Jun 9, 2020·2 cites·16 claims
- 0581US10170286B2In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion sourceAXCELIS TECH INC·Filed 2016·Granted Jan 1, 2019·3 cites·12 claims
- 0677US9870893B2Multi-piece electrode apertureAXCELIS TECH INC·Filed 2017·Granted Jan 16, 2018·2 cites·18 claims
- 0775USD1051838SSingle-slot tubular cathodeAPPLIED MATERIALS INC·Filed 2021·Granted Nov 19, 2024·0 cites·1 claims
- 0875US8779395B2Automatic control system for selection and optimization of co-gas flow levelsCOLVIN NEIL K·Filed 2011·Granted Jul 15, 2014·3 cites·20 claims
- 0974US11631567B2Ion source with single-slot tubular cathodeAPPLIED MATERIALS INC·Filed 2021·Granted Apr 18, 2023·0 cites·18 claims
- 1073US11062873B2Hydrogen bleed gas for an ion source housingAXCELIS TECH INC·Filed 2019·Granted Jul 13, 2021·1 cites·19 claims
- 1172US10847339B2Hydrogen generator for an ion implanterAXCELIS TECH INC·Filed 2019·Granted Nov 24, 2020·1 cites·20 claims
- 1269US8524584B2Carbon implantation process and carbon ion precursor compositionLEE WILLIAM D·Filed 2011·Granted Sep 3, 2013·2 cites·14 claims
- 1367US10361069B2Ion source repeller shield comprising a labyrinth sealAXCELIS TECH INC·Filed 2017·Granted Jul 23, 2019·1 cites·20 claims
- 1465US11276543B2Hydrogen generator for an ion implanterAXCELIS TECH INC·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 1560US11562885B2Particle yield via beam-line pressure controlAPPLIED MATERIALS INC·Filed 2021·Granted Jan 24, 2023·0 cites·20 claims
- 1660US10535498B2Lanthanated tungsten ion source and beamline componentsAXCELIS TECH INC·Filed 2018·Granted Jan 14, 2020·0 cites·14 claims
- 1760US2025232949A1Shield for an Ion ImplanterAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1859US12106925B2Cyclotron having continuously variable energy outputAPPLIED MATERIALS INC·Filed 2021·Granted Oct 1, 2024·0 cites·17 claims
- 1956US2025273427A1Isolation Valve for Implant Productivity EnhancementAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2054US2024274404A1System and Method for Reducing Particle Formation in a Process Chamber of an Ion ImplanterAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2153US12278124B2Model-based controlled load lock pumping schemeAPPLIED MATERIALS INC·Filed 2021·Granted Apr 15, 2025·0 cites·18 claims
- 2253US2024371602A1Heated Plasma Flood Gun SweeperAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2352US10256069B2Phosphorous trifluoride co-gas for carbon implantsAXCELIS TECH INC·Filed 2017·Granted Apr 9, 2019·0 cites·12 claims
- 2452US2017330725A1Lanthanated tungsten ion source and beamline componentsAXCELIS TECH INC·Filed 2017·Application pending·0 cites
- 2551US2023386786A1Ga implant process control for enhanced particle performanceAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2650US9978555B2Ion source liner having a lip for ion implantation systemsAXCELIS TECH INC·Filed 2016·Granted May 22, 2018·0 cites·20 claims
- 2749US10361081B2Phosphine co-gas for carbon implantsAXCELIS TECH INC·Filed 2017·Granted Jul 23, 2019·0 cites·13 claims
- 2845US2015357151A1Ion implantation source with textured interior surfacesAXCELIS TECH INC·Filed 2014·Application pending·0 cites
- 2944US9941087B2Ion source cathode shieldAXCELIS TECH INC·Filed 2017·Granted Apr 10, 2018·0 cites·16 claims
- 3042US2014319994A1Flourine and HF Resistant Seals for an Ion SourceCOLVIN NEIL K·Filed 2013·Application pending·0 cites
- 3141US9805912B2Hydrogen COGas for carbon implantCOLVIN NEIL K·Filed 2010·Granted Oct 31, 2017·0 cites·19 claims
- 3239US9984855B2Implementation of co-gases for germanium and boron ion implantsCOLVIN NEIL K·Filed 2010·Granted May 29, 2018·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →