Inventor · disambiguated record

Tso-Lung Lai

Also filed as: LAI TSO-LUNG

1 granted patent·55 citations·filing 1999–1999

49Inventor score

Technology areasH10P

Files withUNITED MICROELECTRONICS CORP1

Top patents by PatentIndex Score

1 record

0174US6210754B1Method of adjusting for parallel alignment between a shower head and a heater platform in a chamber used in integrated circuit fabricationUNITED MICROELECTRONICS CORP·Filed 1999·Granted Apr 3, 2001·55 cites·5 claims

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