Inventor · disambiguated record
Tsuneyuki Okabe
Also filed as: OKABE TSUNEYUKI
36 granted patents·11 pending applications·273 citations·filing 2001–2023
97Inventor score
Top patents by PatentIndex Score
47 records- 0195US8944095B2Gas supply apparatus for semiconductor manufacturing apparatusOKABE TSUNEYUKI·Filed 2011·Granted Feb 3, 2015·22 cites·6 claims
- 0291US7726333B2Fluid controllerCKD CORP·Filed 2002·Granted Jun 1, 2010·50 cites·12 claims
- 0390US6382238B2Fluid control apparatusTOKYO ELECTRON LTD·Filed 2001·Granted May 7, 2002·39 cites·12 claims
- 0488US7883076B2Semiconductor processing system and vaporizerTOKYO ELECTRON LTD·Filed 2006·Granted Feb 8, 2011·15 cites·20 claims
- 0587US7452424B2VaporizerTOKYO ELECTRON LTD·Filed 2005·Granted Nov 18, 2008·14 cites·20 claims
- 0686US10287682B2Substrate processing apparatus, gas supply method, substrate processing method, and film forming methodTOKYO ELECTRON LTD·Filed 2017·Granted May 14, 2019·2 cites·10 claims
- 0786US7547003B2Vaporizing apparatus and semiconductor processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Jun 16, 2009·14 cites·20 claims
- 0884US11255468B2Gasket for fluid coupling, and fluid couplingFUJIKIN KK·Filed 2016·Granted Feb 22, 2022·3 cites·11 claims
- 0984US8851106B2Gas supplying apparatus, cylinder cabinet provided with the same, valve box, and substrate process apparatusOKABE TSUNEYUKI·Filed 2012·Granted Oct 7, 2014·7 cites·10 claims
- 1084US8197600B2Vaporizer and semiconductor processing systemNAKAO KEN·Filed 2008·Granted Jun 12, 2012·6 cites·19 claims
- 1184US7343926B2Liquid raw material supply unit for vaporizerCKD CORP·Filed 2007·Granted Mar 18, 2008·10 cites·7 claims
- 1283US8371334B2Rotary switching valveCKD CORP·Filed 2010·Granted Feb 12, 2013·7 cites·10 claims
- 1380US8382903B2Vaporizer and semiconductor processing systemTOKYO ELECTRON LTD·Filed 2006·Granted Feb 26, 2013·5 cites·22 claims
- 1479US11402124B2Fluid heater, fluid control apparatus, and production method for fluid heaterFUJIKIN KK·Filed 2019·Granted Aug 2, 2022·2 cites·7 claims
- 1575US7682843B2Semiconductor fabrication system, and flow rate correction method and program for semiconductor fabrication systemTOKYO ELECTRON LTD·Filed 2006·Granted Mar 23, 2010·5 cites·6 claims
- 1674US8104516B2Gas supply unit and gas supply systemMORIYA SHUJI·Filed 2006·Granted Jan 31, 2012·8 cites·8 claims
- 1773US7954452B2Film formation apparatus for semiconductor process and method for using the sameTOKYO ELECTRON LTD·Filed 2007·Granted Jun 7, 2011·4 cites·13 claims
- 1873US6814572B2Heat treating method and heat treating deviceTOKYO ELECTRON LTD·Filed 2002·Granted Nov 9, 2004·17 cites·9 claims
- 1972US9435470B2Pipe jointOKABE TSUNEYUKI·Filed 2012·Granted Sep 6, 2016·3 cites·6 claims
- 2071US7874316B2Purge gas unit and purge gas supply integrated unitCKD CORP·Filed 2007·Granted Jan 25, 2011·7 cites·6 claims
- 2164US8219329B2Thermal type mass flow meter, and thermal type mass flow control deviceEBI HIROYUKI·Filed 2007·Granted Jul 10, 2012·7 cites·9 claims
- 2262US9159548B2Semiconductor processing system including vaporizer and method for using sameTOKYO ELECTRON LTD·Filed 2013·Granted Oct 13, 2015·1 cites·9 claims
- 2362US8973615B2Fluid control deviceHOSHI GEORGE·Filed 2001·Granted Mar 10, 2015·14 cites·1 claims
- 2460US2023087577A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 2559US8893743B2Flow rate controller and processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Nov 25, 2014·2 cites·4 claims
- 2658US11774015B2Pipe jointFUJIKIN KK·Filed 2021·Granted Oct 3, 2023·0 cites·9 claims
- 2757US8298341B2Removal of metal contaminant deposited on quartz member of vertical heat processing apparatusKATOH HITOSHI·Filed 2009·Granted Oct 30, 2012·2 cites·20 claims
- 2856US12503763B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Dec 23, 2025·0 cites·7 claims
- 2956US11965242B2Raw material supply apparatus and raw material supply methodTOKYO ELECTRON LTD·Filed 2020·Granted Apr 23, 2024·0 cites·9 claims
- 3056US2023238255A1Pressure adjusting valve and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 3154US12365985B2Deposition apparatus with pressure sensor and shower head on same plane and deposition methodTOKYO ELECTRON LTD·Filed 2021·Granted Jul 22, 2025·0 cites·8 claims
- 3253US9371946B2Pipe jointTOKYO ELECTRON LTD·Filed 2013·Granted Jun 21, 2016·0 cites·2 claims
- 3352US7510884B2Semiconductor production system and semiconductor production processTOKYO ELECTRON LTD·Filed 2004·Granted Mar 31, 2009·7 cites·18 claims
- 3451US2009186479A1Semiconductor processing system including vaporizer and method for using sameTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 3550US10669632B2Processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jun 2, 2020·0 cites·18 claims
- 3649US2012094011A1Film deposition apparatus and film deposition methodHISHIYA KATSUYUKI·Filed 2011·Application pending·0 cites
- 3746US2022341038A1Raw material supply apparatus and raw material supply methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 3845US2022396873A1Raw material gas supply system and raw material gas supply methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 3945US2014333067A1JointOKABE TSUNEYUKI·Filed 2012·Application pending·0 cites
- 4043US10429263B2Pressure measuring device and exhaust system using the same, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Oct 1, 2019·0 cites·9 claims
- 4143US2008105194A1Gas supply system, gas supply method, method of cleaning thin film forming apparatus, thin film forming method and thin film forming apparatusNAKAO KEN·Filed 2007·Application pending·0 cites
- 4243US2008017105A1Substrate Processing DeviceTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 4342US11208721B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Dec 28, 2021·0 cites·9 claims
- 4441US8387559B2Semiconductor manufacturing plantHIRAIWA JIRO·Filed 2007·Granted Mar 5, 2013·0 cites·13 claims
- 4540US10753497B2Shutoff-opening deviceFUJIKIN KK·Filed 2016·Granted Aug 25, 2020·0 cites·2 claims
- 4639US2005087299A1Semiconductor device fabricating system and semiconductor device fabricating methodFiled 2004·Application pending·0 cites
- 4739US2012222615A1Film deposition apparatusKATO HITOSHI·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Tsuneyuki Okabe files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →