Inventor · disambiguated record
Tsutomu Satoyoshi
Also filed as: SATOYOSHI TSUTOMU
4 granted patents·6 pending applications·168 citations·filing 1995–2020
78Inventor score
Top patents by PatentIndex Score
10 records- 0192US5636960AApparatus for detecting and aligning a substrateTOKYO ELECTRON LTD·Filed 1995·Granted Jun 10, 1997·77 cites·5 claims
- 0290US6331754B1Inductively-coupled-plasma-processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Dec 18, 2001·69 cites·33 claims
- 0375US6387208B2Inductive coupling plasma processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted May 14, 2002·22 cites·12 claims
- 0466US2018327903A1Batch type processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0560US2012325145A1Batch type processing apparatusSATOYOSHI TSUTOMU·Filed 2012·Application pending·0 cites
- 0654US2005120962A1Substrate supporting table, method for producing same, and processing systemFiled 2005·Application pending·0 cites
- 0744US12154760B2Inductively-coupled plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Nov 26, 2024·0 cites·12 claims
- 0840US2005241769A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0940US2002134511A1Substrate supporting table,method for producing same, and processing systemFiled 2002·Application pending·0 cites
- 1036US2015099371A1Nozzle designs for distribution of reactants across substratesQUALCOMM MEMS TECHNOLOGIES INC·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →