Inventor · disambiguated record
Tsuguto Sugawara
Also filed as: SUGAWARA TSUGUTO
5 granted patents·1 pending application·6 citations·filing 2020–2024
71Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0196US11908666B2Stage and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Feb 20, 2024·3 cites·20 claims
- 0292US11935729B2Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Mar 19, 2024·2 cites·7 claims
- 0383US11437223B2Stage and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Sep 6, 2022·1 cites·9 claims
- 0482US12293903B2Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Granted May 6, 2025·0 cites·12 claims
- 0582US12272528B2Stage and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Granted Apr 8, 2025·0 cites·20 claims
- 0680US2025132136A1Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →