Inventor · disambiguated record
Tsutomu Takaku
Also filed as: TAKAKU TSUTOMU
6 granted patents·1 pending application·180 citations·filing 1996–2001
86Inventor score
Top patents by PatentIndex Score
7 records- 0184US5797789APolishing systemSHINETSU HANDOTAI KK·Filed 1997·Granted Aug 25, 1998·65 cites·18 claims
- 0273US6306021B1Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafersSHINETSU HANDOTAI KK·Filed 1999·Granted Oct 23, 2001·31 cites·14 claims
- 0370US5733177AProcess of polishing wafersSHINETSU HANDOTAI KK·Filed 1996·Granted Mar 31, 1998·42 cites·12 claims
- 0454US6190238B1Polishing pad, method and apparatus for treating polishing pad and polishing methodSHINETSU HANDOTAI KK·Filed 1999·Granted Feb 20, 2001·21 cites·19 claims
- 0545US6060396APolishing agent used for polishing semiconductor silicon wafers and polishing method using the sameSHINETSU HANDOTAI KK·Filed 1998·Granted May 9, 2000·12 cites·4 claims
- 0641US5934981AMethod for polishing thin plate and apparatus for polishingSHINETSU HANDOTAI KK·Filed 1997·Granted Aug 10, 1999·9 cites·14 claims
- 0737US2002031990A1Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafersSHIN ESTU HANDOTAI CO LTD·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →