Inventor · disambiguated record
Tsuyoshi Wakabayashi
Also filed as: WAKABAYASHI TSUYOSHI
10 granted patents·736 citations·filing 1989–1998
91Inventor score
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0196US4958061AMethod and apparatus for heat-treating a substrateTOKYO ELECTRON LTD·Filed 1989·Granted Sep 18, 1990·489 cites·10 claims
- 0285US5441076AProcessing apparatus using gasTOKYO ELECTRON LTD·Filed 1994·Granted Aug 15, 1995·51 cites·21 claims
- 0383US5439026AProcessing apparatus and flow control arrangement thereforTOKYO ELECTRON LTD·Filed 1993·Granted Aug 8, 1995·81 cites·7 claims
- 0472US5307568AGas supply systemTOKYO ELECTRON LTD·Filed 1992·Granted May 3, 1994·51 cites·10 claims
- 0557US5514196AAir cleaning apparatusTOKYO ELECTRON LTD·Filed 1994·Granted May 7, 1996·29 cites·15 claims
- 0649US5421365AFlow control apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Jun 6, 1995·15 cites·11 claims
- 0742US5294280AGas measuring device and processing apparatus provided with the gas measuring deviceTOKYO ELECTRON LTD·Filed 1992·Granted Mar 15, 1994·9 cites·10 claims
- 0835US6337365B1Electronic/electric components used in clean room and substrate treatment apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Jan 8, 2002·5 cites·14 claims
- 0934US6403498B1Method and device for treating substrateTOKYO ELECTRON LTD·Filed 1998·Granted Jun 11, 2002·4 cites·23 claims
- 1031US6077894AInstrument and mounting equipment used in clean roomTOKYO ELECTRON LTD·Filed 1997·Granted Jun 20, 2000·2 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →