Inventor · disambiguated record
Tung-Li Wu
Also filed as: WU TUNG-LI
7 granted patents·2 pending applications·14 citations·filing 2004–2025
77Inventor score
Top patents by PatentIndex Score
9 records- 0185US2025321506A1Euv lithography apparatus and operating method for mitigating contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0276US12429783B2EUV lithography apparatus and operating method for mitigating contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·20 claims
- 0370US9081297B2Lithography apparatus having dual reticle edge masking assemblies and method of useWU TUNG-LI·Filed 2012·Granted Jul 14, 2015·2 cites·20 claims
- 0466US9658536B2In-line inspection and clean for immersion lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 23, 2017·1 cites·20 claims
- 0557US12500108B2Bonding system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 16, 2025·0 cites·20 claims
- 0656US2024371705A1Wafer bonding apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0755US7285147B2Air supply systems and pressure adjustment devices for use therewithTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Oct 23, 2007·9 cites·16 claims
- 0853US9709904B2Lithography apparatus having dual reticle edge masking assemblies and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jul 18, 2017·0 cites·20 claims
- 0947US8237132B2Method and apparatus for reducing down time of a lithography systemPENG JUI-CHUN·Filed 2009·Granted Aug 7, 2012·2 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →