Inventor · disambiguated record
Tugrul Yasar
Also filed as: YASAR TUGRUL
18 granted patents·1 pending application·621 citations·filing 1974–2004
96Inventor score
Files withTOKYO ELECTRON LTD12NAT MICRONETICS INC3MATERIALS RESEARCH CORP2BENDIX CORP1SEMIMETALS INC1
Top patents by PatentIndex Score
19 records- 0195US6755945B2Ionized PVD with sequential deposition and etchingTOKYO ELECTRON LTD·Filed 2002·Granted Jun 29, 2004·108 cites·43 claims
- 0295US6417626B1Immersed inductively—coupled plasma sourceTOKYO ELECTRON LTD·Filed 2001·Granted Jul 9, 2002·64 cites·46 claims
- 0390US5408322ASelf aligning in-situ ellipsometer and method of using for process monitoringMATERIALS RESEARCH CORP·Filed 1993·Granted Apr 18, 1995·99 cites·21 claims
- 0488US6652711B2Inductively-coupled plasma processing systemTOKYO ELECTRON LTD·Filed 2001·Granted Nov 25, 2003·31 cites·29 claims
- 0587US6548112B1Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamberTOKYO ELECTRON LTD·Filed 1999·Granted Apr 15, 2003·76 cites·10 claims
- 0674US6183615B1Transport system for wafer processing lineTOKYO ELECTRON LTD·Filed 1995·Granted Feb 6, 2001·59 cites·23 claims
- 0771US5958134AProcess equipment with simultaneous or sequential deposition and etching capabilitiesTOKYO ELECTRON LTD·Filed 1995·Granted Sep 28, 1999·28 cites·21 claims
- 0867US6302057B1Apparatus and method for electrically isolating an electrode in a PECVD process chamberTOKYO ELECTRON LTD·Filed 1998·Granted Oct 16, 2001·34 cites·15 claims
- 0967US5105529AProcess for airborne monolithic ferrite recording head with glass-protected self-aligned, machined trackNAT MICRONETICS INC·Filed 1991·Granted Apr 21, 1992·20 cites·9 claims
- 1063US6635569B1Method of passivating and stabilizing a Ti-PECVD process chamber and combined Ti-PECVD/TiN-CVD processing method and apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Oct 21, 2003·24 cites·29 claims
- 1159US4005457ASemiconductor assembly, method of manufacturing same, and bonding agent thereforSEMIMETALS INC·Filed 1975·Granted Jan 25, 1977·20 cites·27 claims
- 1258US7744735B2Ionized PVD with sequential deposition and etchingTOKYO ELECTRON LTD·Filed 2004·Granted Jun 29, 2010·6 cites·30 claims
- 1356US6632737B1Method for enhancing the adhesion of a barrier layer to a dielectricTOKYO ELECTRON LTD·Filed 2000·Granted Oct 14, 2003·5 cites·86 claims
- 1455US5072322AMonolithic ferrite recording head with glass-protected, self-aligned, machined trackNAT MICRONETICS INC·Filed 1988·Granted Dec 10, 1991·10 cites·14 claims
- 1554US5474667AReduced stress sputtering target and method of manufacturing thereforMATERIALS RESEARCH CORP·Filed 1994·Granted Dec 12, 1995·16 cites·25 claims
- 1652US6730605B2Redistribution of copper deposited filmsTOKYO ELECTRON LTD·Filed 2001·Granted May 4, 2004·5 cites·43 claims
- 1740US4112196ABeam lead arrangement for microelectronic devicesNAT MICRONETICS INC·Filed 1977·Granted Sep 5, 1978·13 cites·5 claims
- 1840US3987226AFace plate for an acoustical optical image tubeBENDIX CORP·Filed 1974·Granted Oct 19, 1976·3 cites·7 claims
- 1936US2002137338A1Method for depositing copper films having controlled morphology and semiconductor wafers produced therebyTOKYO ELECTRON LTD·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →