Inventor · disambiguated record
Tzu-Min Peng
Also filed as: PENG TZU-MIN
5 granted patents·125 citations·filing 1995–1999
82Inventor score
Top patents by PatentIndex Score
5 records- 0178US5731243AMethod of cleaning residue on a semiconductor wafer bonding padTAIWAN SEMICONDUCTOR MFG·Filed 1995·Granted Mar 24, 1998·66 cites·13 claims
- 0258US5672543AVolcano defect-free tungsten plugTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Sep 30, 1997·29 cites·10 claims
- 0352US6060349APlanarization on an embedded dynamic random access memoryUNITED MICROELECTRONICS CORP·Filed 1998·Granted May 9, 2000·13 cites·10 claims
- 0443US6316368B1Method of fabricating a node contactUNITED MICROELECTRONICS CORP·Filed 1999·Granted Nov 13, 2001·12 cites·13 claims
- 0528US5604134AParticle monitoring method for plasma reactors with moving gas distribution housingsTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Feb 18, 1997·5 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →