Inventor · disambiguated record
Ulrich Bihr
Also filed as: BIHR ULRICH
8 granted patents·4 pending applications·38 citations·filing 2017–2025
80Inventor score
Top patents by PatentIndex Score
12 records- 0194US10854423B2Multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Dec 1, 2020·31 cites·22 claims
- 0281US10261424B2Lithography apparatus and method for operating a lithography apparatusZEISS CARL SMT GMBH·Filed 2017·Granted Apr 16, 2019·2 cites·29 claims
- 0380US10838307B2Apparatus and method for operating an apparatusZEISS CARL SMT GMBH·Filed 2019·Granted Nov 17, 2020·2 cites·20 claims
- 0474US10139618B2Multi-mirror arrayZEISS CARL SMT GMBH·Filed 2017·Granted Nov 27, 2018·3 cites·20 claims
- 0567US11239054B2Multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Feb 1, 2022·0 cites·21 claims
- 0667US2023043036A1High throughput multi-beam charged particle inspection system with dynamic controlCARL ZEISS MULTISEM GMBH·Filed 2022·Application pending·0 cites
- 0765US2025343025A1Multi-beam particle microscope with improved multi-beam generator for field curvature correction and multi-beam generatorCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 0857US2024379322A1Multi-beam system and multi-beam generating unit with reduced sensitivity to drift and damagesCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 0957US2024170252A1Multi-beam generating unit with increased focusing powerCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 1054US11262660B2Image sensor, position sensor device, lithography system, and method for operating an image sensorZEISS CARL SMT GMBH·Filed 2020·Granted Mar 1, 2022·0 cites·20 claims
- 1149US12255040B2Multi-beam particle beam system and method for operating sameCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Mar 18, 2025·0 cites·20 claims
- 1247US10514619B2Sensor arrangement for a lithography system, lithography system, and method for operating a lithography systemZEISS CARL SMT GMBH·Filed 2018·Granted Dec 24, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →