Inventor · disambiguated record
Ulrich Schönhoff
Also filed as: SCHOENHOFF ULRICH · SCHÖNHOFF ULRICH
3 granted patents·12 citations·filing 2007–2014
61Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0187US8064151B2Lithographic apparatus and thermal optical manipulator control methodJANSEN BASTIAAN STEPHANUS HENDRICUS·Filed 2007·Granted Nov 22, 2011·10 cites·18 claims
- 0273US8861102B2Lithographic apparatus and thermal optical manipulator control methodJANSEN BASTIAAN STEPHANUS HENDRICUS·Filed 2011·Granted Oct 14, 2014·2 cites·19 claims
- 0331US9958793B2Lithographic apparatus, positioning system for use in a lithographic apparatus and methodASML NETHERLANDS BV·Filed 2014·Granted May 1, 2018·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →