Inventor · disambiguated record
Ute Buttgereit
Also filed as: BUTTGEREIT UTE
7 granted patents·7 pending applications·47 citations·filing 2003–2021
76Inventor score
Top patents by PatentIndex Score
14 records- 0188US7029803B2Attenuating phase shift mask blank and photomaskIBM·Filed 2003·Granted Apr 18, 2006·45 cites·50 claims
- 0272US10698318B2Method and device for characterizing a mask for microlithographyZEISS CARL SMT GMBH·Filed 2018·Granted Jun 30, 2020·1 cites·19 claims
- 0370US10788748B2Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried outZEISS CARL SMT GMBH·Filed 2018·Granted Sep 29, 2020·1 cites·26 claims
- 0462US9869640B2Method and device for examining a maskZEISS CARL SMT GMBH·Filed 2014·Granted Jan 16, 2018·0 cites·20 claims
- 0555US11899358B2Method for measuring photomasksZEISS CARL SMT GMBH·Filed 2021·Granted Feb 13, 2024·0 cites·20 claims
- 0652US10539865B2Method and device for determining an OPC modelZEISS CARL SMT GMBH·Filed 2017·Granted Jan 21, 2020·0 cites·24 claims
- 0747US2015198541A1Method and device for examining a maskZEISS CARL SMS GMBH·Filed 2015·Application pending·0 cites
- 0845US10578975B2Method for correcting the critical dimension uniformity of a photomask for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2018·Granted Mar 3, 2020·0 cites·11 claims
- 0939US2004159538A1Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blankFiled 2003·Application pending·0 cites
- 1037US2007128528A1Mask blank and photomask having antireflective propertiesHESS GUNTER·Filed 2006·Application pending·0 cites
- 1135US2004231971A1Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blankFiled 2004·Application pending·0 cites
- 1234US2005260504A1Mask blank having a protection layerBECKER HANS·Filed 2005·Application pending·0 cites
- 1334US2007076833A1Attenuated phase shift mask blank and photomaskBECKER HANS·Filed 2004·Application pending·0 cites
- 1434US2005190450A1Ultra high transmission phase shift mask blanksFiled 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →