Inventor · disambiguated record
Uwe Hamm
Also filed as: HAMM UWE · HAMM UWE W
3 granted patents·1 pending application·26 citations·filing 2001–2005
68Inventor score
Top patents by PatentIndex Score
4 records- 0172US6781685B2Process and device for in-situ decontamination of a EUV lithography deviceZEISS CARL SMT AG·Filed 2001·Granted Aug 24, 2004·16 cites·15 claims
- 0256US6824277B2Optical beam guidance system and method for preventing contamination of optical components contained thereinZEISS CARL SMT AG·Filed 2002·Granted Nov 30, 2004·8 cites·13 claims
- 0341US6559060B2Process for the structuring of a substrateZEISS STIFTUNG·Filed 2001·Granted May 6, 2003·2 cites·18 claims
- 0435US2006158707A1Mount for an optical element, method for fitting an optical element on a mount and method for manipulating an optical deviceSCHWERTNER TILMANN·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →