Inventor · disambiguated record
Vandana Krishnamurthy
Also filed as: KRISHNAMURTHY VANDANA
16 granted patents·652 citations·filing 1994–2024
94Inventor score
Top patents by PatentIndex Score
16 records- 0196US5919599AThermosetting anti-reflective coatings at deep ultravioletBREWER SCIENCE INC·Filed 1997·Granted Jul 6, 1999·157 cites·19 claims
- 0295US8968989B2Assist layers for EUV lithographyBREWER SCIENCE INC·Filed 2012·Granted Mar 3, 2015·297 cites·15 claims
- 0394US8257910B1Underlayers for EUV lithographyGUERRERO DOUGLAS J·Filed 2009·Granted Sep 4, 2012·38 cites·35 claims
- 0491US8895230B2Spin-on carbon compositions for lithographic processingBREWER SCIENCE INC·Filed 2012·Granted Nov 25, 2014·10 cites·19 claims
- 0590US5892096ANon-subliming mid-UV dyes and ultra-thin organic arcs having differential solubilityBREWER SCIENCE INC·Filed 1996·Granted Apr 6, 1999·36 cites·2 claims
- 0688US9249013B2Silicon hardmask layer for directed self-assemblyBREWER SCIENCE INC·Filed 2013·Granted Feb 2, 2016·10 cites·23 claims
- 0788US9102129B2Spin-on carbon compositions for lithographic processingBREWER SCIENCE INC·Filed 2014·Granted Aug 11, 2015·6 cites·12 claims
- 0888US5688987ANon-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubilityBREWER SCIENCE INC·Filed 1994·Granted Nov 18, 1997·26 cites·3 claims
- 0985US6740469B2Developer-soluble metal alkoxide coatings for microelectronic applicationsBREWER SCIENCE INC·Filed 2002·Granted May 25, 2004·31 cites·61 claims
- 1080US6872506B2Wet-developable anti-reflective compositionsBREWER SCIENCE INC·Filed 2003·Granted Mar 29, 2005·22 cites·40 claims
- 1177US6962769B2Anti-reflective coating composition with improved spin bowl compatibilityBREWER SCIENCE INC·Filed 2003·Granted Nov 8, 2005·16 cites·73 claims
- 1275US11972948B2Adhesion layers for EUV lithographyBREWER SCIENCE INC·Filed 2019·Granted Apr 30, 2024·2 cites·29 claims
- 1369US12437993B2Adhesion layers for EUV lithographyBREWER SCIENCE INC·Filed 2024·Granted Oct 7, 2025·0 cites·20 claims
- 1456USRE46841ESpin-on carbon compositions for lithographic processingBREWER SCIENCE INC·Filed 2016·Granted May 15, 2018·0 cites·23 claims
- 1555US9960038B2Processes to pattern small features for advanced patterning needsWASHBURN CARLTON ASHLEY·Filed 2011·Granted May 1, 2018·1 cites·19 claims
- 1643US11817317B2High-silicon-content wet-removable planarizing layerBREWER SCIENCE INC·Filed 2020·Granted Nov 14, 2023·0 cites·37 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →