Inventor · disambiguated record
Vignesh Chandrasekar
Also filed as: CHANDRASEKAR VIGNESH
1 granted patent·3 pending applications·0 citations·filing 2020–2025
13Inventor score
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0157US2025246486A1Station-to-station control of backside bow compensation depositionLAM RES CORP·Filed 2025·Application pending·0 cites
- 0254US12272608B2Station-to-station control of backside bow compensation depositionLAM RES CORP·Filed 2020·Granted Apr 8, 2025·0 cites·28 claims
- 0344US2022136107A1Showerhead with configurable gas outletsLAM RES CORP·Filed 2020·Application pending·0 cites
- 0438US2024003010A1Backside deposition and local stress modulation for wafer bow compensationLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →