Inventor · disambiguated record
Vijay D. Parkhe
Also filed as: PARKHE VIJAY · PARKHE VIJAY D
143 granted patents·45 pending applications·4,947 citations·filing 1995–2025
99Inventor score
Top patents by PatentIndex Score
188 records- 0199US5796074AWafer heater assemblyAPPLIED MATERIALS INC·Filed 1995·Granted Aug 18, 1998·609 cites·21 claims
- 0298US12347659B2Electrostatic chuck assembly for cryogenic applicationsAPPLIED MATERIALS INC·Filed 2024·Granted Jul 1, 2025·3 cites·23 claims
- 0398US10460916B2Real time monitoring with closed loop chucking force controlAPPLIED MATERIALS INC·Filed 2018·Granted Oct 29, 2019·45 cites·11 claims
- 0498US9404176B2Substrate support with radio frequency (RF) return pathAPPLIED MATERIALS INC·Filed 2013·Granted Aug 2, 2016·45 cites·18 claims
- 0598US6853533B2Full area temperature controlled electrostatic chuck and method of fabricating sameAPPLIED MATERIALS INC·Filed 2001·Granted Feb 8, 2005·215 cites·69 claims
- 0698US6125789AIncreasing the sensitivity of an in-situ particle monitorAPPLIED MATERIALS INC·Filed 1998·Granted Oct 3, 2000·564 cites·31 claims
- 0797US10688750B2Bonding structure of E chuck to aluminum base configurationAPPLIED MATERIALS INC·Filed 2017·Granted Jun 23, 2020·13 cites·20 claims
- 0897US10008399B2Electrostatic puck assembly with metal bonded backing plate for high temperature processesAPPLIED MATERIALS INC·Filed 2015·Granted Jun 26, 2018·16 cites·20 claims
- 0997US9805965B2Pixelated capacitance controlled ESCAPPLIED MATERIALS INC·Filed 2016·Granted Oct 31, 2017·54 cites·9 claims
- 1097US6743473B1Chemical vapor deposition of barriers from novel precursorsAPPLIED MATERIALS INC·Filed 2000·Granted Jun 1, 2004·400 cites·31 claims
- 1197US6475902B1Chemical vapor deposition of niobium barriers for copper metallizationAPPLIED MATERIALS INC·Filed 2000·Granted Nov 5, 2002·380 cites·20 claims
- 1297US5903428AHybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating sameAPPLIED MATERIALS INC·Filed 1997·Granted May 11, 1999·300 cites·19 claims
- 1396US10904996B2Substrate support with electrically floating power supplyAPPLIED MATERIALS INC·Filed 2017·Granted Jan 26, 2021·43 cites·19 claims
- 1496US10249526B2Substrate support assembly for high temperature processesAPPLIED MATERIALS INC·Filed 2016·Granted Apr 2, 2019·12 cites·20 claims
- 1596US10020218B2Substrate support assembly with deposited surface featuresAPPLIED MATERIALS INC·Filed 2015·Granted Jul 10, 2018·18 cites·19 claims
- 1696US10008404B2Electrostatic chuck assembly for high temperature processesAPPLIED MATERIALS INC·Filed 2015·Granted Jun 26, 2018·14 cites·19 claims
- 1796US9472410B2Pixelated capacitance controlled ESCAPPLIED MAT·Filed 2014·Granted Oct 18, 2016·294 cites·20 claims
- 1896US8390980B2Electrostatic chuck assemblySANSONI STEVEN V·Filed 2009·Granted Mar 5, 2013·187 cites·8 claims
- 1996US6190037B1Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring systemAPPLIED MATERIALS INC·Filed 1999·Granted Feb 20, 2001·455 cites·27 claims
- 2095US12334385B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2024·Granted Jun 17, 2025·1 cites·10 claims
- 2195US12033837B2Electrostatic chuck assembly for cryogenic applicationsAPPLIED MATERIALS INC·Filed 2023·Granted Jul 9, 2024·1 cites·20 claims
- 2295US9685356B2Substrate support assembly having metal bonded protective layerAPPLIED MATERIALS INC·Filed 2013·Granted Jun 20, 2017·18 cites·13 claims
- 2395US9196514B2Electrostatic chuck with variable pixilated heatingPARKHE VIJAY D·Filed 2013·Granted Nov 24, 2015·28 cites·20 claims
- 2494US12061103B2Packaging design for a flow sensor and methods of manufacturing thereofAPPLIED MATERIALS INC·Filed 2021·Granted Aug 13, 2024·3 cites·13 claims
- 2594US9536769B1Pixelated capacitance controlled ESCAPPLIED MATERIALS INC·Filed 2016·Granted Jan 3, 2017·11 cites·12 claims
- 2694US8559159B2Electrostatic chuck and methods of use thereofROY SHAMBHU N·Filed 2011·Granted Oct 15, 2013·21 cites·20 claims
- 2794US7589950B2Detachable electrostatic chuck having sealing assemblyAPPLIED MATERIALS INC·Filed 2006·Granted Sep 15, 2009·69 cites·38 claims
- 2893US11742225B2Electrostatic puck assembly with metal bonded backing plateAPPLIED MATERIALS INC·Filed 2021·Granted Aug 29, 2023·2 cites·27 claims
- 2993US11410869B1Electrostatic chuck with differentiated ceramicsAPPLIED MATERIALS INC·Filed 2021·Granted Aug 9, 2022·2 cites·20 claims
- 3093US10679885B2Substrate support assembly with deposited surface featuresAPPLIED MATERIALS INC·Filed 2018·Granted Jun 9, 2020·7 cites·20 claims
- 3193US9831111B2Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuckAPPLIED MATERIALS INC·Filed 2014·Granted Nov 28, 2017·13 cites·20 claims
- 3293US9669653B2Electrostatic chuck refurbishmentAPPLIED MATERIALS INC·Filed 2014·Granted Jun 6, 2017·11 cites·20 claims
- 3393US9666466B2Electrostatic chuck having thermally isolated zones with minimal crosstalkAPPLIED MATERIALS INC·Filed 2014·Granted May 30, 2017·10 cites·20 claims
- 3493US6503368B1Substrate support having bonded sections and methodAPPLIED MATERIALS INC·Filed 2000·Granted Jan 7, 2003·76 cites·22 claims
- 3592US8971009B2Electrostatic chuck with temperature controlAPPLIED MATERIALS INC·Filed 2012·Granted Mar 3, 2015·13 cites·20 claims
- 3692US8852348B2Heat exchange pedestal with coating of diamond-like materialPARKHE VIJAY D·Filed 2010·Granted Oct 7, 2014·15 cites·23 claims
- 3792US6033482AMethod for igniting a plasma in a plasma processing chamberAPPLIED MATERIALS INC·Filed 1998·Granted Mar 7, 2000·69 cites·13 claims
- 3891US11769683B2Chamber component with protective ceramic coating containing yttrium, aluminum and oxygenAPPLIED MATERIALS INC·Filed 2022·Granted Sep 26, 2023·1 cites·20 claims
- 3991US10790180B2Electrostatic chuck with variable pixelated magnetic fieldAPPLIED MATERIALS INC·Filed 2019·Granted Sep 29, 2020·5 cites·9 claims
- 4091US9666467B2Detachable high-temperature electrostatic chuck assemblyVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted May 30, 2017·10 cites·21 claims
- 4189US12097665B2Porous plug bondingAPPLIED MATERIALS INC·Filed 2022·Granted Sep 24, 2024·1 cites·23 claims
- 4289US11818810B2Heater assembly with purge gap control and temperature uniformity for batch processing chambersAPPLIED MATERIALS INC·Filed 2021·Granted Nov 14, 2023·2 cites·8 claims
- 4389US9853579B2Rotatable heated electrostatic chuckAPPLIED MATERIALS INC·Filed 2014·Granted Dec 26, 2017·9 cites·20 claims
- 4489US5757537AElectrochromic devices and methodsSUN ACTIVE GLASS ELECTROCHROM·Filed 1995·Granted May 26, 1998·96 cites·33 claims
- 4588US11776794B2Electrostatic chuck assembly for cryogenic applicationsAPPLIED MATERIALS INC·Filed 2021·Granted Oct 3, 2023·1 cites·20 claims
- 4688US5650052AVariable cell size collimatorFiled 1995·Granted Jul 22, 1997·61 cites·22 claims
- 4787US11043360B2Gas distribution plate assembly for high power plasma etch processesAPPLIED MATERIALS INC·Filed 2017·Granted Jun 22, 2021·4 cites·18 claims
- 4887US10079165B2Electrostatic chuck with independent zone cooling and reduced crosstalkAPPLIED MATERIALS INC·Filed 2014·Granted Sep 18, 2018·6 cites·20 claims
- 4987US10056284B2Electrostatic chuck optimized for refurbishmentAPPLIED MATERIALS INC·Filed 2017·Granted Aug 21, 2018·3 cites·20 claims
- 5087US6246567B1Apparatus for igniting a plasma in a plasma processing chamberAPPLIED MATERIALS INC·Filed 1999·Granted Jun 12, 2001·50 cites·3 claims
Showing the top 50 of 188 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Vijay D. Parkhe files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →