Inventor · disambiguated record
Vithal Revankar
Also filed as: REVANKAR VITHAL
12 granted patents·6 pending applications·37 citations·filing 1995–2014
87Inventor score
Files withMEMC ELECTRONIC MATERIALS6REVANKAR VITHAL6KULKARNI MILIND S3ADVANCED REFRACTORY TECH2SAVI RES INC1
Top patents by PatentIndex Score
18 records- 0180US8657958B2CVD-Siemens monosilane reactor process with complete utilization of feed gases and total recycleREVANKAR VITHAL·Filed 2010·Granted Feb 25, 2014·3 cites·11 claims
- 0276US8404206B2Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor wallsKULKARNI MILIND S·Filed 2011·Granted Mar 26, 2013·2 cites·11 claims
- 0375US8906313B2Fluidized bed reactor systemsKULKARNI MILIND S·Filed 2009·Granted Dec 9, 2014·3 cites·18 claims
- 0474US8399072B2Process for improved chemcial vapor deposition of polysiliconREVANKAR VITHAL·Filed 2009·Granted Mar 19, 2013·3 cites·30 claims
- 0570US8993056B2Method of gas distribution and nozzle design in the improved chemical vapor deposition of polysilicon reactorREVANKAR VITHAL·Filed 2010·Granted Mar 31, 2015·1 cites·7 claims
- 0670US8728574B2Methods for introducing a first gas and a second gas into a reaction chamberKULKARNI MILIND S·Filed 2012·Granted May 20, 2014·1 cites·13 claims
- 0764US2015107298A1Cvd-siemens reactor process hydrogen recycle systemSAVI RES INC·Filed 2014·Application pending·0 cites
- 0862US7691351B2Method for treatment of a gas stream containing silicon tetrafluoride and hydrogen chlorideMEMC ELECTRONIC MATERIALS·Filed 2008·Granted Apr 6, 2010·1 cites·68 claims
- 0960US7943108B2Processes for purification of silicon tetrafluorideMEMC ELECTRONIC MATERIALS·Filed 2008·Granted May 17, 2011·0 cites·24 claims
- 1060US2010009843A1Processes for preparing a catalystMEMC ELECTRONIC MATERIALS·Filed 2009·Application pending·0 cites
- 1160US2010009844A1Catalysts useful in the purification of silicon tetrafluorideMEMC ELECTRONIC MATERIALS·Filed 2009·Application pending·0 cites
- 1258US5693305AMethod for synthesizing aluminum nitride whiskersADVANCED REFRACTORY TECH·Filed 1995·Granted Dec 2, 1997·14 cites·25 claims
- 1352US8124039B2Process of silicon tetrafluoride gas synthesisREVANKAR VITHAL·Filed 2009·Granted Feb 28, 2012·0 cites·12 claims
- 1452US7897125B1Silicon tetrafluoride byproduct separation processREVANKAR VITHAL·Filed 2009·Granted Mar 1, 2011·0 cites·9 claims
- 1552US2009324819A1Methods for increasing polycrystalline silicon reactor productivity by recycle of silicon finesMEMC ELECTRONIC MATERIALS·Filed 2009·Application pending·0 cites
- 1652US2011206842A1CVD-Siemens Reactor Process Hydrogen Recycle SystemREVANKAR VITHAL·Filed 2010·Application pending·0 cites
- 1749US2010178225A1Method for treatment of a gas stream containing silicon tetrafluoride and hydrogen chlorideMEMC ELECTRONIC MATERIALS·Filed 2010·Application pending·0 cites
- 1848US5665326AMethod for synthesizing titanium nitride whiskersADVANCED REFRACTORY TECH·Filed 1995·Granted Sep 9, 1997·9 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →