Inventor · disambiguated record
Vikas Giridhar Telkar
Also filed as: TELKAR VIKAS GIRIDHAR
2 granted patents·2 pending applications·0 citations·filing 2021–2023
22Inventor score
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0153US12295088B2Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systemsASML NETHERLANDS BV·Filed 2021·Granted May 6, 2025·0 cites·21 claims
- 0253US12222050B2Robust fluid coupling apparatusASML NETHERLANDS BV·Filed 2021·Granted Feb 11, 2025·0 cites·25 claims
- 0352US2024292510A1Apparatus and method for producing droplets of target material in an euv sourceASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0445US2025227834A1High pressure coupling assemblyASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →