Inventor · disambiguated record
Vladimir Zila
Also filed as: ZILA VLADIMIR
13 granted patents·3 pending applications·909 citations·filing 1996–2010
95Inventor score
Top patents by PatentIndex Score
16 records- 0195US6440178B2Modular semiconductor workpiece processing toolSEMITOOL INC·Filed 2001·Granted Aug 27, 2002·82 cites·12 claims
- 0295US6203582B1Modular semiconductor workpiece processing toolSEMITOOL INC·Filed 1996·Granted Mar 20, 2001·154 cites·14 claims
- 0394US6309520B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 30, 2001·92 cites·61 claims
- 0493US6309524B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 30, 2001·107 cites·39 claims
- 0593US6091498ASemiconductor processing apparatus having lift and tilt mechanismSEMITOOL INC·Filed 1997·Granted Jul 18, 2000·115 cites·12 claims
- 0691US5731678AProcessing head for semiconductor processing machinesSEMITOOL INC·Filed 1996·Granted Mar 24, 1998·120 cites·32 claims
- 0789US6699373B2Apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Mar 2, 2004·40 cites·42 claims
- 0887US6869510B2Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Mar 22, 2005·26 cites·21 claims
- 0987US6303010B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 16, 2001·81 cites·8 claims
- 1086US6654122B1Semiconductor processing apparatus having lift and tilt mechanismSEMITOOL INC·Filed 2000·Granted Nov 25, 2003·31 cites·31 claims
- 1175US6645356B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Nov 11, 2003·28 cites·56 claims
- 1270US6805185B2Cover panel attachment system for partitionsSTEELCASE DEV CORP·Filed 2001·Granted Oct 19, 2004·25 cites·39 claims
- 1367US7074246B2Modular semiconductor workpiece processing toolSEMITOOL INC·Filed 2002·Granted Jul 11, 2006·8 cites·12 claims
- 1451US2005189213A1Method and apparatus for copper plating using electroless plating and electroplatingFiled 2005·Application pending·0 cites
- 1550US2005193537A1Modular semiconductor workpiece processing toolFiled 2005·Application pending·0 cites
- 1639US2011213480A1Parametric product configuration systemGENEXIS DESIGN INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →