Inventor · disambiguated record
Volker Becker
Also filed as: BECKER VOLKER
28 granted patents·2 pending applications·337 citations·filing 1997–2020
96Inventor score
Top patents by PatentIndex Score
30 records- 0183US7811941B1Device and method for etching a substrate using an inductively coupled plasmaBOSCH GMBH ROBERT·Filed 2000·Granted Oct 12, 2010·31 cites·30 claims
- 0282US7007783B2Axially fixed and adjustable drive plateBORGWARNER INC·Filed 2003·Granted Mar 7, 2006·19 cites·7 claims
- 0381US6214161B1Method and apparatus for anisotropic etching of substratesBOSCH GMBH ROBERT·Filed 1998·Granted Apr 10, 2001·58 cites·17 claims
- 0478US6371434B1Spring arrangement apparatus for mounting a vibration-sensitive or shock-sensitive deviceBOSCH GMBH ROBERT·Filed 1997·Granted Apr 16, 2002·44 cites·8 claims
- 0577US8395809B2Positioning device for a color measuring headENGLER HANS·Filed 2007·Granted Mar 12, 2013·2 cites·11 claims
- 0677US7863338B2Absorbent polymer granulateEVONIK STOCKHAUSEN GMBH·Filed 2010·Granted Jan 4, 2011·3 cites·13 claims
- 0773US6200822B1Method for detecting the transition between different materials in semiconductor structuresBOSCH GMBH ROBERT·Filed 1998·Granted Mar 13, 2001·44 cites·6 claims
- 0867US6899817B1Device and method for etching a substrate using an inductively coupled plasmaBOSCH GMBH ROBERT·Filed 2000·Granted May 31, 2005·11 cites·17 claims
- 0967US6720273B1Device and method for the high-frequency etching of a substrate using a plasma etching installation and device and method for igniting a plasma and for pulsing the plasma out put or adjusting the same upwardsBOSCH GMBH ROBERT·Filed 2000·Granted Apr 13, 2004·11 cites·16 claims
- 1066US7728045B2Process for producing an absorbent polymer by means of spread-dryingEVONIK STOCKHAUSEN GMBH·Filed 2005·Granted Jun 1, 2010·2 cites·7 claims
- 1166US6531031B1Plasma etching installationBOSCH GMBH ROBERT·Filed 1999·Granted Mar 11, 2003·18 cites·19 claims
- 1261US6911348B1Device and method for determining the lateral undercut of a structured surface layerBOSCH GMBH ROBERT·Filed 2000·Granted Jun 28, 2005·7 cites·27 claims
- 1360US7785486B2Method of etching structures into an etching body using a plasmaBOSCH GMBH ROBERT·Filed 2003·Granted Aug 31, 2010·7 cites·20 claims
- 1460US7052623B1Method for processing silicon using etching processesBOSCH GMBH ROBERT·Filed 1999·Granted May 30, 2006·24 cites·32 claims
- 1558US7099238B1Method of reproducing data in which an accelerated selection may be possible of storage media to be reproduced or to be rejected by a playback deviceBOSCH GMBH ROBERT·Filed 2000·Granted Aug 29, 2006·3 cites·17 claims
- 1658US6947356B1Method for selecting a storage mediumBOSCH GMBH ROBERT·Filed 2000·Granted Sep 20, 2005·3 cites·14 claims
- 1754US7092326B2Player for storage mediaBOSCH GMBH ROBERT·Filed 2002·Granted Aug 15, 2006·2 cites·8 claims
- 1853US7065007B2Method and a playback device for performing a track slipBOSCH GMBH ROBERT·Filed 2001·Granted Jun 20, 2006·2 cites·5 claims
- 1951US7178154B2Disc drive with carrier completely in the drive in a loading position and protruding out of the drive in an eject positionBOSCH GMBH ROBERT·Filed 2002·Granted Feb 13, 2007·1 cites·19 claims
- 2051US6920638B2Disk driveBOSCH GMBH ROBERT·Filed 2002·Granted Jul 19, 2005·1 cites·14 claims
- 2151US6459673B1Apparatus for holding in readiness and selecting at least one storage diskBOSCH GMBH ROBERT·Filed 1999·Granted Oct 1, 2002·9 cites·10 claims
- 2251US6340644B1Method for applying a protecting lacquer on a waferBOSCH GMBH ROBERT·Filed 1998·Granted Jan 22, 2002·15 cites·15 claims
- 2349US6709546B2Device and method for etching a substrate by using an inductively coupled plasmaBOSCH GMBH ROBERT·Filed 2001·Granted Mar 23, 2004·2 cites·12 claims
- 2447US6178152B1Device for playing compact disksBOSCH GMBH ROBERT·Filed 1998·Granted Jan 23, 2001·8 cites·6 claims
- 2546US2022388839A1Method for Creating Hydrophilic Surfaces or Surface Regions on a SubstrateBOSCH GMBH ROBERT·Filed 2020·Application pending·0 cites
- 2645US6558559B1Method of manufacturing micromechanical surface structures by vapor-phase etchingBOSCH GMBH ROBERT·Filed 1998·Granted May 6, 2003·10 cites·22 claims
- 2743US10377057B2Process for the continuous preparation of water-absorbent polymersEVONIK DEGUSSA GMBH·Filed 2012·Granted Aug 13, 2019·0 cites·14 claims
- 2842US8946090B2Method for etching a layer on a silicon semiconductor substrateBECKER VOLKER·Filed 2008·Granted Feb 3, 2015·0 cites·22 claims
- 2942US7094706B2Device and method for etching a substrate by using an inductively coupled plasmaBOSCH GMBH ROBERT·Filed 2004·Granted Aug 22, 2006·0 cites·10 claims
- 3036US2015017426A1Cooling neutralized acrylic acid by means of an absorption chillerVORHOLT HERBERT·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →