Inventor · disambiguated record
Volker Hemel
Also filed as: HEMEL VOLKER
2 granted patents·1 pending application·1 citations·filing 2004–2021
31Inventor score
Top patents by PatentIndex Score
3 records- 0158US9076649B2Film forming method and apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jul 7, 2015·1 cites·15 claims
- 0254US12334380B2Boat transfer method and heat treatment apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jun 17, 2025·0 cites·8 claims
- 0333US2005276922A1Method of forming thin dielectric layersBERNHARDT HENRY·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →