Inventor · disambiguated record
Vu Quang Tran
Also filed as: TRAN VU QUANG
1 granted patent·1 pending application·4 citations·filing 2019–2022
24Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0187US11175593B2Alignment sensor apparatus for process sensitivity compensationASML NETHERLANDS BV·Filed 2019·Granted Nov 16, 2021·4 cites·38 claims
- 0244US2024264537A1A method for modeling measurement data over a substrate area and associated apparatusesASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →