Inventor · disambiguated record
Wataru Adachi
Also filed as: ADACHI WATARU
9 granted patents·2 pending applications·1,499 citations·filing 2012–2025
90Inventor score
Top patents by PatentIndex Score
11 records- 0198US9663857B2Method for stabilizing reaction chamber pressureASM IP HOLDING BV·Filed 2014·Granted May 30, 2017·466 cites·6 claims
- 0297US8790743B1Method for controlling cyclic plasma-assisted processASM IP HOLDING BV·Filed 2013·Granted Jul 29, 2014·485 cites·18 claims
- 0392US8911826B2Method of parallel shift operation of multiple reactorsADACHI WATARU·Filed 2012·Granted Dec 16, 2014·518 cites·19 claims
- 0491US9576790B2Deposition of boron and carbon containing materialsASM IP HOLDING BV·Filed 2015·Granted Feb 21, 2017·7 cites·26 claims
- 0576US11149350B2Shower plate structure for supplying carrier and dry gasASM IP HOLDING BV·Filed 2018·Granted Oct 19, 2021·2 cites·19 claims
- 0672US10950449B2Substrate processing apparatusASM IP HOLDING BV·Filed 2018·Granted Mar 16, 2021·1 cites·9 claims
- 0770USD944946SShower plateASM IP HOLDING BV·Filed 2019·Granted Mar 1, 2022·12 cites·1 claims
- 0862USD935572SGas channel plateASM IP HOLDING BV·Filed 2019·Granted Nov 9, 2021·8 cites·1 claims
- 0961US2025046605A1Substrate processing methodASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1058US2025297360A1Substrate processing methodASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1139US11685998B2Substrate processing apparatus, storage medium and substrate processing methodASM IP HOLDING BV·Filed 2018·Granted Jun 27, 2023·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →