Inventor · disambiguated record
Wayne K. Borglum
Also filed as: BORGLUM WAYNE K
3 granted patents·130 citations·filing 1986–1992
76Inventor score
Files withPROMETRIX CORP3
Top patents by PatentIndex Score
3 records- 0178US4776695AHigh accuracy film thickness measurement systemPROMETRIX CORP·Filed 1986·Granted Oct 11, 1988·41 cites·13 claims
- 0275US5260668ASemiconductor surface resistivity probe with semiconductor temperature controlPROMETRIX CORP·Filed 1992·Granted Nov 9, 1993·46 cites·9 claims
- 0370US4907931AApparatus for handling semiconductor wafersPROMETRIX CORP·Filed 1988·Granted Mar 13, 1990·43 cites·32 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →