Inventor · disambiguated record
Wan-Lin Chen
Also filed as: CHEN WAN-LIN
9 granted patents·98 citations·filing 2002–2016
88Inventor score
Top patents by PatentIndex Score
9 records- 0186US7541291B2Reduction of feature critical dimensionsLAM RES CORP·Filed 2007·Granted Jun 2, 2009·11 cites·29 claims
- 0283US7347915B1Plasma in-situ treatment of chemically amplified resistLAM RES CORP·Filed 2006·Granted Mar 25, 2008·8 cites·9 claims
- 0383US7250371B2Reduction of feature critical dimensionsLAM RES CORP·Filed 2003·Granted Jul 31, 2007·27 cites·11 claims
- 0481US9865472B2Fabrication of a silicon structure and deep silicon etch with profile controlLAM RES CORP·Filed 2016·Granted Jan 9, 2018·3 cites·13 claims
- 0575US9330926B2Fabrication of a silicon structure and deep silicon etch with profile controlCHEBI ROBERT·Filed 2008·Granted May 3, 2016·7 cites·32 claims
- 0674US6780569B1Post-development treatment of patterned photoresist to promote cross-linking of polymer chainsLAM RES CORP·Filed 2002·Granted Aug 24, 2004·13 cites·18 claims
- 0773US7022611B1Plasma in-situ treatment of chemically amplified resistLAM RES CORP·Filed 2003·Granted Apr 4, 2006·14 cites·4 claims
- 0871US7192531B1In-situ plug fillLAM RES CORP·Filed 2003·Granted Mar 20, 2007·14 cites·17 claims
- 0942US7226869B2Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processingLAM RES CORP·Filed 2004·Granted Jun 5, 2007·1 cites·38 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →