Inventor · disambiguated record
Ward Johnson
Also filed as: JOHNSON WARD · JOHNSON WARD A
11 granted patents·1 pending application·18 citations·filing 2013–2022
85Inventor score
Top patents by PatentIndex Score
12 records- 0186US10872771B2Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structuresASM IP HOLDING BV·Filed 2019·Granted Dec 22, 2020·4 cites·16 claims
- 0284US11056567B2Method of forming a doped metal carbide film on a substrate and related semiconductor device structuresASM IP HOLDING BV·Filed 2019·Granted Jul 6, 2021·3 cites·29 claims
- 0380US10847371B2Method of forming an electrode on a substrate and a semiconductor device structure including an electrodeASM IP HOLDING BV·Filed 2019·Granted Nov 24, 2020·2 cites·14 claims
- 0480US9159556B2Alleviation of the corrosion pitting of chip padsIBM·Filed 2013·Granted Oct 13, 2015·6 cites·8 claims
- 0577US10829852B2Gas distribution device for a wafer processing apparatusASM IP HOLDING BV·Filed 2018·Granted Nov 10, 2020·2 cites·16 claims
- 0673US12020938B2Method of forming an electrode on a substrate and a semiconductor device structure including an electrodeASM IP HOLDING BV·Filed 2022·Granted Jun 25, 2024·0 cites·20 claims
- 0766US11837483B2Wafer handling chamber with moisture reductionASM IP HOLDING BV·Filed 2022·Granted Dec 5, 2023·0 cites·20 claims
- 0866US11398382B2Method of forming an electrode on a substrate and a semiconductor device structure including an electrodeASM IP HOLDING BV·Filed 2020·Granted Jul 26, 2022·0 cites·18 claims
- 0961US11501973B2Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structuresASM IP HOLDING BV·Filed 2020·Granted Nov 15, 2022·0 cites·18 claims
- 1061US9496110B2Micro-electro-mechanical system (MEMS) structure and design structuresIBM·Filed 2013·Granted Nov 15, 2016·1 cites·19 claims
- 1158US2021328036A1Method for forming a doped metal carbide film on a substrate and related semiconductor device structuresASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 1256US11270899B2Wafer handling chamber with moisture reductionASM IP HOLDING BV·Filed 2019·Granted Mar 8, 2022·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →