Inventor · disambiguated record
Wade A. Krull
Also filed as: KRULL WADE · KRULL WADE A · KRULL WADE ALLEN
17 granted patents·3 pending applications·430 citations·filing 1998–2015
95Inventor score
Top patents by PatentIndex Score
20 records- 0197US8097529B2System and method for the manufacture of semiconductor devices by the implantation of carbon clustersKRULL WADE A·Filed 2009·Granted Jan 17, 2012·103 cites·4 claims
- 0296US7629590B2Method and apparatus for extending equipment uptime in ion implantationSEMEQUIP INC·Filed 2006·Granted Dec 8, 2009·41 cites·22 claims
- 0396US7609003B2Ion implantation system and control methodSEMEQUIP INC·Filed 2006·Granted Oct 27, 2009·43 cites·5 claims
- 0495US7666771B2System and method for the manufacture of semiconductor devices by the implantation of carbon clustersSEMEQUIP INC·Filed 2006·Granted Feb 23, 2010·30 cites·2 claims
- 0592US7791047B2Method and apparatus for extracting ions from an ion source for use in ion implantationSEMEQUIP INC·Filed 2006·Granted Sep 7, 2010·17 cites·5 claims
- 0690US7919402B2Cluster ion implantation for defect engineeringSEMEQUIP INC·Filed 2008·Granted Apr 5, 2011·25 cites·17 claims
- 0790US7064491B2Ion implantation system and control methodSEMEQUIP INC·Filed 2001·Granted Jun 20, 2006·40 cites·27 claims
- 0889US7394202B2Ion implantation system and control methodSEMEQUIP INC·Filed 2006·Granted Jul 1, 2008·12 cites·1 claims
- 0987US7820981B2Method and apparatus for extending equipment uptime in ion implantationSEMEQUIP INC·Filed 2004·Granted Oct 26, 2010·30 cites·62 claims
- 1084US10497598B2Electrostatic chuck and method of making sameENTEGRIS INC·Filed 2015·Granted Dec 3, 2019·4 cites·64 claims
- 1184US5998798AIon dosage measurement apparatus for an ion beam implanter and methodEATON CORP·Filed 1998·Granted Dec 7, 1999·54 cites·19 claims
- 1282US8530343B2System and method for the manufacture of semiconductor devices by the implantation of carbon clustersKRULL WADE A·Filed 2011·Granted Sep 10, 2013·4 cites·13 claims
- 1382US8368309B2Method and apparatus for extracting ions from an ion source for use in ion implantationSEMEQUIP INC·Filed 2006·Granted Feb 5, 2013·6 cites·23 claims
- 1479US8236675B2Semiconductor device and method of fabricating a semiconductor deviceKRULL WADE A·Filed 2009·Granted Aug 7, 2012·5 cites·5 claims
- 1575US7528550B2Ion implantation system and control methodSEMEQUIP INC·Filed 2006·Granted May 5, 2009·3 cites·36 claims
- 1672US7723233B2Semiconductor device and method of fabricating a semiconductor deviceSEMEQUIP INC·Filed 2003·Granted May 25, 2010·12 cites·23 claims
- 1764US7994031B2Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ionsSEMEQUIP INC·Filed 2006·Granted Aug 9, 2011·1 cites·42 claims
- 1851US2006272776A1Method and apparatus for extracting ions from an ion source for use in ion implantationHORSKY THOMAS N·Filed 2006·Application pending·0 cites
- 1944US2008200020A1Semiconductor device and method of fabricating a semiconductor deviceSEMEQUIP INC·Filed 2006·Application pending·0 cites
- 2041US2004002202A1Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ionsFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →