Inventor · disambiguated record
Wataru Nagatomo
Also filed as: NAGATOMO WATARU
23 granted patents·7 pending applications·225 citations·filing 2004–2025
95Inventor score
Top patents by PatentIndex Score
30 records- 0197US7559047B2Method and apparatus for creating imaging recipeHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 7, 2009·36 cites·15 claims
- 0295US7365322B2Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device patternHITACHI LTD·Filed 2006·Granted Apr 29, 2008·28 cites·29 claims
- 0394US7449689B2Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the methodHITACHI HIGH TECH CORP·Filed 2005·Granted Nov 11, 2008·23 cites·20 claims
- 0493US7633061B2Method and apparatus for measuring pattern dimensionsHITACHI HIGH TECH CORP·Filed 2008·Granted Dec 15, 2009·25 cites·14 claims
- 0590US7816062B2Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a patternHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 19, 2010·17 cites·27 claims
- 0690US7615746B2Method and apparatus for evaluating pattern shape of a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 10, 2009·12 cites·18 claims
- 0787US10255519B2Inspection apparatus and method using pattern matchingHITACHI HIGH TECH CORP·Filed 2016·Granted Apr 9, 2019·6 cites·8 claims
- 0887US8853630B2Scanning electron microscope and a method for imaging a specimen using the sameHITACHI HIGH TECH CORP·Filed 2014·Granted Oct 7, 2014·5 cites·10 claims
- 0984US6929892B2Method of monitoring an exposure processHITACHI HIGH TECH CORP·Filed 2004·Granted Aug 16, 2005·25 cites·15 claims
- 1082US8158938B2Scanning electron microscope and a method for imaging a specimen using the sameMIYAMOTO ATSUSHI·Filed 2007·Granted Apr 17, 2012·5 cites·18 claims
- 1182US2025363641A1Pattern Matching Device, Pattern Measurement System, and Non-Transitory Computer-Readable MediumHITACHI HIGH TECH CORP·Filed 2025·Application pending·0 cites
- 1278US7685560B2Method and apparatus for monitoring exposure processHITACHI HIGH TECH CORP·Filed 2004·Granted Mar 23, 2010·16 cites·14 claims
- 1375US8642957B2Scanning electron microscope and a method for imaging a specimen using the sameMIYAMOTO ATSUSHI·Filed 2012·Granted Feb 4, 2014·2 cites·7 claims
- 1475US8214166B2Method and its system for calibrating measured data between different measuring toolsTANAKA MAKI·Filed 2008·Granted Jul 3, 2012·4 cites·21 claims
- 1573US8885950B2Pattern matching method and pattern matching apparatusNAGATOMO WATARU·Filed 2010·Granted Nov 11, 2014·6 cites·19 claims
- 1673USRE45224EMethod and apparatus for creating imaging recipeMIYAMOTO ATSUSHI·Filed 2009·Granted Oct 28, 2014·2 cites·29 claims
- 1771US10535129B2Pattern matching apparatus and computer programKITAZAWA MASAHIRO·Filed 2011·Granted Jan 14, 2020·4 cites·12 claims
- 1867US8881067B2Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor deviceNAGATOMO WATARU·Filed 2013·Granted Nov 4, 2014·3 cites·14 claims
- 1964US11669953B2Pattern matching device and computer program for pattern matchingHITACHI HIGH TECH CORP·Filed 2015·Granted Jun 6, 2023·1 cites·9 claims
- 2063US8356260B2Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 15, 2013·4 cites·8 claims
- 2162US12412275B2Pattern matching device, pattern measurement system, and non-transitory computer-readable mediumHITACHI HIGH TECH CORP·Filed 2020·Granted Sep 9, 2025·0 cites·9 claims
- 2260USRE45204EMethod and apparatus for creating imaging recipeMIYAMOTO ATSUSHI·Filed 2009·Granted Oct 21, 2014·0 cites·16 claims
- 2354US9619727B2Matching process device, matching process method, and inspection device employing sameHITACHI HIGH TECH CORP·Filed 2013·Granted Apr 11, 2017·1 cites·8 claims
- 2453US2023230886A1Processor system, semiconductor inspection system, and programHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 2551US2009212215A1Scanning electron microscope and method of measuring pattern dimension using the sameHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 2641US2016140287A1Template Creation Device for Sample Observation Device, and Sample Observation DeviceHITACHI HIGH TECH CORP·Filed 2014·Application pending·0 cites
- 2740US2005016682A1Method of setting etching parameters and system thereforFiled 2004·Application pending·0 cites
- 2838US2014016854A1Pattern matching device and computer programNAGATOMO WATARU·Filed 2011·Application pending·0 cites
- 2936US2012126116A1Pattern shape selection method and pattern measuring deviceTANAKA MAKI·Filed 2010·Application pending·0 cites
- 3034US8971627B2Template matching processing device and template matching processing programTAGUCHI JUN ICHI·Filed 2011·Granted Mar 3, 2015·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →