Inventor · disambiguated record
Wayne Tu
Also filed as: TU WAYNE
2 granted patents·1 pending application·13 citations·filing 2001–2006
52Inventor score
Top patents by PatentIndex Score
3 records- 0166US6977184B1Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoringLAM RES CORP·Filed 2001·Granted Dec 20, 2005·13 cites·18 claims
- 0242US2006040415A1Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoringLAM RES CORP·Filed 2005·Application pending·0 cites
- 0335US7344630B2Method and apparatus for electroplating small workpiecesTU HSIUE-TE·Filed 2006·Granted Mar 18, 2008·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →