Inventor · disambiguated record
Wei Chang
Also filed as: CHANG WEI · CHANG WEI-MU
7 granted patents·93 citations·filing 2001–2019
83Inventor score
Files withKLA TENCOR CORP6
Top patents by PatentIndex Score
7 records- 0196US9087176B1Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process controlKLA TENCOR CORP·Filed 2014·Granted Jul 21, 2015·57 cites·20 claims
- 0289US10650508B2Automatic defect classification without sampling and feature selectionKLA TENCOR CORP·Filed 2015·Granted May 12, 2020·12 cites·20 claims
- 0383US9707660B2Predictive wafer modeling based focus error prediction using correlations of wafersKLA TENCOR CORP·Filed 2014·Granted Jul 18, 2017·4 cites·28 claims
- 0473US10545412B2Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process controlKLA TENCOR CORP·Filed 2015·Granted Jan 28, 2020·2 cites·18 claims
- 0568USD466959SDinosaur assembly modelFiled 2001·Granted Dec 10, 2002·18 cites·1 claims
- 0656US11456194B2Determining critical parameters using a high-dimensional variable selection modelKLA TENCOR CORP·Filed 2019·Granted Sep 27, 2022·0 cites·10 claims
- 0750US10361105B2Determining critical parameters using a high-dimensional variable selection modelKLA TENCOR CORP·Filed 2015·Granted Jul 23, 2019·0 cites·11 claims
Join the waitlist — get patent alerts
Get an alert when Wei Chang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →