Inventor · disambiguated record
Wen-Ben Chou
Also filed as: CHOU WEN-BEN
4 granted patents·1 pending application·95 citations·filing 1996–2005
79Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0190US6337277B1Clean chemistry low-k organic polymer etchLAM RES CORP·Filed 2000·Granted Jan 8, 2002·55 cites·20 claims
- 0272US7479458B1Methods and apparatus for the optimization of highly selective process gasesLAM RES CORP·Filed 2005·Granted Jan 20, 2009·8 cites·16 claims
- 0366US6977184B1Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoringLAM RES CORP·Filed 2001·Granted Dec 20, 2005·13 cites·18 claims
- 0463US5904571AMethods and apparatus for reducing charging during plasma processingLAM RES CORP·Filed 1996·Granted May 18, 1999·19 cites·22 claims
- 0542US2006040415A1Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoringLAM RES CORP·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Wen-Ben Chou files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →