Inventor · disambiguated record
Wei Liu
Also filed as: LIU WEI · LIU WEI-CHIEN
31 granted patents·24 pending applications·226 citations·filing 1998–2025
95Inventor score
Top patents by PatentIndex Score
55 records- 0196US11658006B2Plasma sources and plasma processing apparatus thereofAPPLIED MATERIALS INC·Filed 2021·Granted May 23, 2023·4 cites·10 claims
- 0294US6213050B1Enhanced plasma mode and computer system for plasma immersion ion implantationSILICON GENESIS CORP·Filed 1998·Granted Apr 10, 2001·106 cites·15 claims
- 0393US12243762B2Door locking mechanism and semiconductor container using the sameGUDENG PREC IND CO LTD·Filed 2023·Granted Mar 4, 2025·2 cites·9 claims
- 0492US6300227B1Enhanced plasma mode and system for plasma immersion ion implantationSILICON GENESIS CORP·Filed 1998·Granted Oct 9, 2001·78 cites·16 claims
- 0591US11854770B2Plasma processing with independent temperature controlAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·2 cites·23 claims
- 0691US10347492B2Modifying work function of a metal film with a plasma processAPPLIED MATERIALS INC·Filed 2018·Granted Jul 9, 2019·6 cites·17 claims
- 0789US11152221B2Methods and apparatus for metal silicide depositionAPPLIED MATERIALS INC·Filed 2020·Granted Oct 19, 2021·2 cites·19 claims
- 0889US2025385080A1Process chamber process kit with protective coatingAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0986US9831091B2Plasma treating a process chamberAPPLIED MATERIALS INC·Filed 2016·Granted Nov 28, 2017·4 cites·10 claims
- 1086US9054048B2NH3 containing plasma nitridation of a layer on a substrateLIU WEI·Filed 2012·Granted Jun 9, 2015·7 cites·16 claims
- 1184US10103027B2Hydrogenation and nitridization processes for modifying effective oxide thickness of a filmAPPLIED MATERIALS INC·Filed 2017·Granted Oct 16, 2018·3 cites·18 claims
- 1284US2025273494A1Modularized large-sized carrierGUDENG PREC IND CO LTD·Filed 2025·Application pending·0 cites
- 1382US9177787B2NH3 containing plasma nitridation of a layer of a three dimensional structure on a substrateAPPLIED MATERIALS INC·Filed 2014·Granted Nov 3, 2015·5 cites·12 claims
- 1479US12272521B2Plasma sources and plasma processing apparatus thereofAPPLIED MATERIALS INC·Filed 2023·Granted Apr 8, 2025·0 cites·16 claims
- 1575US12237190B2Supporting shelf module and wafer container using sameGUDENG PREC IND CO LTD·Filed 2021·Granted Feb 25, 2025·0 cites·8 claims
- 1673US10290504B2Plasma treating a process chamberAPPLIED MATERIALS INC·Filed 2017·Granted May 14, 2019·1 cites·16 claims
- 1773US9048190B2Methods and apparatus for processing substrates using an ion shieldAPPLIED MATERIALS INC·Filed 2013·Granted Jun 2, 2015·2 cites·14 claims
- 1873US2023245863A1Process chamber process kit with protective coatingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1972US2024170263A1Plasma processing with independent temperature controlAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2072US2022089325A1Modularized large-sized carrierGUDENG PREC IND CO LTD·Filed 2021·Application pending·0 cites
- 2171US12183608B2Substrate container with enhanced flow field thereinGUDENG PREC IND CO LTD·Filed 2021·Granted Dec 31, 2024·0 cites·7 claims
- 2271US11615986B2Methods and apparatus for metal silicide depositionAPPLIED MATERIALS INC·Filed 2021·Granted Mar 28, 2023·0 cites·22 claims
- 2361US12354843B2Process chamber process kit with protective coatingAPPLIED MATERIALS INC·Filed 2019·Granted Jul 8, 2025·0 cites·21 claims
- 2459US10504779B2Hydrogenation and nitridization processes for reducing oxygen content in a filmAPPLIED MATERIALS INC·Filed 2019·Granted Dec 10, 2019·0 cites·20 claims
- 2559US2025132147A1Methods for treatment of high-k materials to reduce leakage current and increase capacitanceAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2658US11987431B2Top-opening substrate carrierGUDENG PREC IND CO LTD·Filed 2023·Granted May 21, 2024·0 cites·10 claims
- 2757US10431466B2Hydrogenation and nitridization processes for modifying effective oxide thickness of a filmAPPLIED MATERIALS INC·Filed 2018·Granted Oct 1, 2019·0 cites·20 claims
- 2857US2025364220A1Bilayer plasma oxidation processesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2957US2025019144A1Holding device for top-opening substrate containerGUDENG PREC IND CO LTD·Filed 2023·Application pending·0 cites
- 3057US2024170261A1Plasma generator for edge uniformityAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3156US2024304422A1Plasma processing with independent temperature controlAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3255USD976001SBox for transporting boardsGUDENG PREC IND CO LTD·Filed 2020·Granted Jan 24, 2023·2 cites·1 claims
- 3355US9530898B2Semiconductor devices suitable for narrow pitch applications and methods of fabrication thereofAPPLIED MATERIALS INC·Filed 2014·Granted Dec 27, 2016·0 cites·8 claims
- 3455US2019287805A1Modifying work function of a metal film with a plasma processAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3552US2012164845A1Dual zone gas injection nozzleLIU WEI·Filed 2012·Application pending·0 cites
- 3651USD1068701SBox for transporting boardsGUDENG PREC IND CO LTD·Filed 2022·Granted Apr 1, 2025·1 cites·1 claims
- 3751USD1068700SBox for transporting boardsGUDENG PREC IND CO LTD·Filed 2022·Granted Apr 1, 2025·1 cites·1 claims
- 3851US10236207B2Hydrogenation and nitridization processes for reducing oxygen content in a filmAPPLIED MATERIALS INC·Filed 2017·Granted Mar 19, 2019·0 cites·20 claims
- 3951US2023215702A1Uniformity control for plasma processing using wall recombinationAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4050US9355820B2Methods for removing carbon containing filmsAPPLIED MATERIALS INC·Filed 2014·Granted May 31, 2016·0 cites·20 claims
- 4149US10510545B2Hydrogenation and nitridization processes for modifying effective oxide thickness of a filmAPPLIED MATERIALS INC·Filed 2019·Granted Dec 17, 2019·0 cites·20 claims
- 4249US2009162570A1Apparatus and method for processing a substrate using inductively coupled plasma technologyAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 4348US2022270777A1Dynamic Pinhole Aperture for Charged Particle Therapy SystemsMAYO FOUND MEDICAL EDUCATION & RES·Filed 2022·Application pending·0 cites
- 4446US2022013336A1Process kit with protective ceramic coatings for hydrogen and nh3 plasma applicationAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 4546US2015332941A1Methods and apparatus for processing substrates using an ion shieldAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4645US2021175075A1Oxygen radical assisted dielectric film densificationAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4744US10580643B2Fluorination during ALD high-k, fluorination post high-k and use of a post fluorination anneal to engineer fluorine bonding and incorporationAPPLIED MATERIALS INC·Filed 2017·Granted Mar 3, 2020·0 cites·20 claims
- 4843US2002027205A1Enhanced plasma mode and system for plasma immersion ion implantationFiled 2001·Application pending·0 cites
- 4942US9966271B2Method for modifying epitaxial growth shapeAPPLIED MATERIALS INC·Filed 2016·Granted May 8, 2018·0 cites·20 claims
- 5038US2010039635A1Filter Device Disposed in Reticle Library of Lithography SystemLIU YU-CHANG·Filed 2008·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Wei Liu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →