Inventor · disambiguated record
Weiwu Zhong
Also filed as: ZHONG WEIWU
1 granted patent·1 pending application·0 citations·filing 2019–2024
13Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0168US2024363311A1Rf power compensation to reduce deposition or etch rate changes in response to substrate bulk resistivity variationsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0254US12057295B2RF power compensation to reduce deposition or etch rate changes in response to substrate bulk resistivity variationsLAM RES CORP·Filed 2019·Granted Aug 6, 2024·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →