Inventor · disambiguated record
Wenzhan Zhou
Also filed as: ZHOU WENZHAN
3 granted patents·3 pending applications·5 citations·filing 2007–2023
56Inventor score
Files withZHOU WENZHAN3CHARTERED SEMICONDUCTOR MFG1GLOBALFOUNDRIES SG PTE LTD1SHANGHAI HUALI INTEGRATED CIRCUIT CORP1
Top patents by PatentIndex Score
6 records- 0179US8741511B1Determination of lithography tool process conditionGLOBALFOUNDRIES SG PTE LTD·Filed 2012·Granted Jun 3, 2014·4 cites·21 claims
- 0255US8572524B2Statistical optical proximity correctionZHOU WENZHAN·Filed 2007·Granted Oct 29, 2013·1 cites·19 claims
- 0350US2024019783A1Method for adjusting local thickness of photoresistSHANGHAI HUALI INTEGRATED CIRCUIT CORP·Filed 2023·Application pending·0 cites
- 0449US8896810B2Liquid immersion scanning exposure system using an immersion liquid confined within a lens hoodZHOU WENZHAN·Filed 2009·Granted Nov 25, 2014·0 cites·20 claims
- 0540US2009179307A1Integrated circuit system employing feed-forward controlCHARTERED SEMICONDUCTOR MFG·Filed 2008·Application pending·0 cites
- 0633US2013325395A1Co-optimization of scatterometry mark design and process monitor mark designZHOU WENZHAN·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →