Inventor · disambiguated record
Wilhelm Frey
Also filed as: FREY WILHELM
38 granted patents·8 pending applications·782 citations·filing 1998–2016
98Inventor score
Top patents by PatentIndex Score
46 records- 0197US7449355B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2005·Granted Nov 11, 2008·57 cites·36 claims
- 0293US5996409AAcceleration sensing deviceBOSCH GMBH ROBERT·Filed 1998·Granted Dec 7, 1999·104 cites·18 claims
- 0390US6555443B1Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrateBOSCH GMBH ROBERT·Filed 1999·Granted Apr 29, 2003·120 cites·26 claims
- 0489US6672732B1Micromechanical oscillating deviceBOSCH GMBH ROBERT·Filed 2000·Granted Jan 6, 2004·44 cites·18 claims
- 0587US6592664B1Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrateBOSCH GMBH ROBERT·Filed 2000·Granted Jul 15, 2003·27 cites·25 claims
- 0687US6369931B1Method for manufacturing a micromechanical deviceBOSCH GMBH ROBERT·Filed 1998·Granted Apr 9, 2002·62 cites·14 claims
- 0785US6726815B1Electrochemical etching cellBOSCH GMBH ROBERT·Filed 2000·Granted Apr 27, 2004·21 cites·28 claims
- 0884US7922849B2Process and apparatus for manufacturing spun-bonded fabricREIFENHAUSER GMBH & CO KG MASCHINENFABRIK·Filed 2006·Granted Apr 12, 2011·8 cites·12 claims
- 0983US9453292B2Method and apparatus for making a spunbondSOMMER SEBASTIAN·Filed 2007·Granted Sep 27, 2016·8 cites·5 claims
- 1082US7319372B2In-plane mechanically coupled microelectromechanical tuning fork resonatorsUNIV LELAND STANFORD JUNIOR·Filed 2005·Granted Jan 15, 2008·15 cites·14 claims
- 1181US6443008B1Decoupled multi-disk gyroscopeBOSCH GMBH ROBERT·Filed 2000·Granted Sep 3, 2002·45 cites·20 claims
- 1279US7625773B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2008·Granted Dec 1, 2009·7 cites·43 claims
- 1379US7026184B2Method of fabricating microstructures and devices made therefromUNIV CARNEGIE MELLON·Filed 2003·Granted Apr 11, 2006·41 cites·22 claims
- 1478US6825057B1Thermal membrane sensor and method for the production thereofBOSCH GMBH ROBERT·Filed 1998·Granted Nov 30, 2004·42 cites·15 claims
- 1572US6655834B1Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membraneBOSCH GMBH ROBERT·Filed 2000·Granted Dec 2, 2003·18 cites·11 claims
- 1670US6489864B2Filter for electric signalsBOSCH GMBH ROBERT·Filed 2001·Granted Dec 3, 2002·13 cites·13 claims
- 1769US6648389B2Process for manipulating components, a microtool for implementing the process, and a process for manufacturing the microtool or microtool partsBOSCH GMBH ROBERT·Filed 2000·Granted Nov 18, 2003·15 cites·18 claims
- 1868US6677249B2Method for manufacturing breakaway layers for detaching deposited layer systemsBOSCH GMBH ROBERT·Filed 1999·Granted Jan 13, 2004·34 cites·12 claims
- 1962US6486665B1Magnetic field sensor having deformable conductor loop segmentBOSCH GMBH ROBERT·Filed 1998·Granted Nov 26, 2002·23 cites·14 claims
- 2061US6790699B2Method for manufacturing a semiconductor deviceBOSCH GMBH ROBERT·Filed 2002·Granted Sep 14, 2004·10 cites·26 claims
- 2159US6905615B2Method of manufacturing a micromechanical componentBOSCH GMBH ROBERT·Filed 2002·Granted Jun 14, 2005·8 cites·7 claims
- 2259US6372656B1Method of producing a radiation sensorBOSCH GMBH ROBERT·Filed 1999·Granted Apr 16, 2002·22 cites·13 claims
- 2354US6901800B2Differential in-plane tunneling current sensorBOSCH GMBH ROBERT·Filed 2004·Granted Jun 7, 2005·5 cites·2 claims
- 2452US7611790B2Zinc/air battery with improved lifetimeBOSCH GMBH ROBERT·Filed 2005·Granted Nov 3, 2009·0 cites·9 claims
- 2552US6645800B2Method for the production of a field-effect structureBOSCH GMBH ROBERT·Filed 2001·Granted Nov 11, 2003·3 cites·13 claims
- 2650US6856067B2Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensorBOSCH GMBH ROBERT·Filed 2003·Granted Feb 15, 2005·7 cites·30 claims
- 2749US7342703B2Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending actionBOSCH GMBH ROBERT·Filed 2007·Granted Mar 11, 2008·0 cites·16 claims
- 2849US2008180821A1Apparatus, method and system for providing enhanced mechanical protection of thin beamsNIENDORF ANDREAS·Filed 2008·Application pending·0 cites
- 2947US6960536B2Method for producing integrated microsystemsBOSCH GMBH ROBERT·Filed 2003·Granted Nov 1, 2005·2 cites·12 claims
- 3047US6808640B2Micromechanical part and method for its manufactureBOSCH GMBH ROBERT·Filed 2002·Granted Oct 26, 2004·1 cites·13 claims
- 3143US6360604B1Acceleration sensorBOSCH GMBH ROBERT·Filed 1998·Granted Mar 26, 2002·9 cites·24 claims
- 3242US7177068B2Apparatus, method and system for providing enhanced mechanical protection for thin beamsBOSCH GMBH ROBERT·Filed 2002·Granted Feb 13, 2007·0 cites·16 claims
- 3341US9618414B2Device for determining a pressure and method for manufacturing the sameBOSCH GMBH ROBERT·Filed 2016·Granted Apr 11, 2017·0 cites·9 claims
- 3440US7176540B2Method for producing micromechanical structures and a micromechanical structureBOSCH GMBH ROBERT·Filed 2004·Granted Feb 13, 2007·1 cites·4 claims
- 3540US2007111360A1Method for producing micromechanical structures and a micromechanical structureFREY WILHELM·Filed 2006·Application pending·0 cites
- 3639US6895818B2Differential in-plane tunneling current sensorBOSCH GMBH ROBERT·Filed 2002·Granted May 24, 2005·0 cites·22 claims
- 3739US6217647B1Method for producing a monocrystalline layer of a conducting or semiconducting materialBOSCH GMBH ROBERT·Filed 1999·Granted Apr 17, 2001·6 cites·22 claims
- 3838US2003161949A1Vapor deposition of dihalodialklysilanesUNIV CALIFORNIA·Filed 2002·Application pending·0 cites
- 3937US2005054134A1Method for manufacturing a microsystemFiled 2004·Application pending·0 cites
- 4036US6867061B2Method for producing surface micromechanical structures, and sensorBOSCH GMBH ROBERT·Filed 2002·Granted Mar 15, 2005·0 cites·18 claims
- 4136US2004118241A1Arrangement, method, and system to reduce the play of micro-mechanical produced gearsFiled 2002·Application pending·0 cites
- 4235US2011203385A1Device for measuring torsions, bendings, and the like, and corresponding manufacturing methodHUELS JAN·Filed 2011·Application pending·0 cites
- 4334US8595916B2Method for producing high-pressure sensorsHENNING FRANK·Filed 2009·Granted Dec 3, 2013·0 cites·6 claims
- 4434US2004084398A1Module, especially a wafer moduleFiled 2001·Application pending·0 cites
- 4533US6174746B1Method of producing optical waveguidesBOSCH GMBH ROBERT·Filed 1998·Granted Jan 16, 2001·4 cites·5 claims
- 4633US2012067131A1High pressure sensorMOELKNER THOMAS·Filed 2010·Application pending·0 cites
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