Inventor · disambiguated record

Wibur C. Krusell

Also filed as: KRUSELL WIBUR C

2 granted patents·52 citations·filing 1997–1999

67Inventor score

Technology areasH10P

Files withLAM RES CORP1 ONTRAK SYSTEMS INC1

Top patents by PatentIndex Score

2 records

0174US5858109AMethod and apparatus for cleaning of semiconductor substrates using standard clean 1 (SC1)ONTRAK SYSTEMS INC·Filed 1997·Granted Jan 12, 1999·38 cites·11 claims
0252US6324715B1Apparatus for cleaning semiconductor substratesLAM RES CORP·Filed 1999·Granted Dec 4, 2001·14 cites·8 claims

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