Inventor · disambiguated record
William M. Lu
Also filed as: LU WILLIAM M · LU WILLIAM MING-YE
7 granted patents·3 pending applications·24 citations·filing 2012–2021
79Inventor score
Top patents by PatentIndex Score
10 records- 0189US10583465B230 nm in-line LPC testing and cleaning of semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2017·Granted Mar 10, 2020·4 cites·9 claims
- 0283US11260498B2Method of polishing a new or a refurbished electrostatic chuckAPPLIED MATERIALS INC·Filed 2014·Granted Mar 1, 2022·5 cites·11 claims
- 0381US9101954B2Geometries and patterns for surface texturing to increase deposition retentionAPPLIED MATERIALS INC·Filed 2013·Granted Aug 11, 2015·8 cites·17 claims
- 0478US9001489B2Electrostatic chuck AlN dielectric repairBOYD JR WENDELL G·Filed 2012·Granted Apr 7, 2015·7 cites·16 claims
- 0569US11648639B2Polishing jig assembly for a new or refurbished electrostatic chuckAPPLIED MATERIALS INC·Filed 2021·Granted May 16, 2023·0 cites·16 claims
- 0661US11072852B2Pre-conditioned chamber componentsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 27, 2021·0 cites·20 claims
- 0748US2012255635A1Method and apparatus for refurbishing gas distribution plate surfacesBANDA SUMANTH·Filed 2012·Application pending·0 cites
- 0847US11810766B2Protection of aluminum process chamber componentsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 7, 2023·0 cites·20 claims
- 0946US2017145553A1Pre-coated shield using in vhf-rf pvd chambersAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 1036US2012258280A1Extended life textured chamber components and method for fabricating sameJACKSON MICHAEL·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →