Inventor · disambiguated record
Wilfred Pau
Also filed as: PAU WILFRED
2 granted patents·1 pending application·17 citations·filing 2001–2007
58Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0176US7648914B2Method for etching having a controlled distribution of process resultsAPPLIED MATERIALS INC·Filed 2006·Granted Jan 19, 2010·6 cites·20 claims
- 0264US6635573B2Method of detecting an endpoint during etching of a material within a recessAPPLIED MATERIALS INC·Filed 2001·Granted Oct 21, 2003·11 cites·29 claims
- 0339US2007161255A1Method for etching with hardmaskPAU WILFRED·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →