Inventor · disambiguated record
Wilheim Ulrich
Also filed as: ULRICH WILHEIM
1 granted patent·2 pending applications·0 citations·filing 2002–2014
13Inventor score
Top patents by PatentIndex Score
3 records- 0153US2014327898A1Microlithography projection optical system and method for manufacturing a deviceZEISS CARL SMT GMBH·Filed 2014·Application pending·0 cites
- 0251US9285515B2Imaging optical system and projection exposure system including the sameZEISS CARL SMT GMBH·Filed 2013·Granted Mar 15, 2016·0 cites·29 claims
- 0330US2006109559A1Catadioptric multi-mirror systems for projection lithographyZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →