Inventor · disambiguated record
Willem Henk Urbanus
Also filed as: URBANUS WILLEM HENK
13 granted patents·2 pending applications·34 citations·filing 2011–2025
88Inventor score
Top patents by PatentIndex Score
15 records- 0189US9165693B2Multi-electrode cooling arrangementMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted Oct 20, 2015·7 cites·32 claims
- 0289US8586949B2Charged particle lithography system with intermediate chamberDINU-GUERTLER LAURA·Filed 2011·Granted Nov 19, 2013·17 cites·16 claims
- 0386US10037864B2High voltage shielding and cooling in a charged particle beam generatorMAPPER LITHOGRAPHY IP BV·Filed 2017·Granted Jul 31, 2018·3 cites·37 claims
- 0482US8916837B2Charged particle lithography system with intermediate chamberMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Dec 23, 2014·4 cites·23 claims
- 0580US11961627B2Vacuum chamber arrangement for charged particle beam generatorASML NETHERLANDS BV·Filed 2023·Granted Apr 16, 2024·0 cites·20 claims
- 0675US12387903B2Aberration correction in charged particle systemASML NETHERLANDS BV·Filed 2022·Granted Aug 12, 2025·0 cites·20 claims
- 0775US11348756B2Aberration correction in charged particle systemASML NETHERLANDS BV·Filed 2018·Granted May 31, 2022·1 cites·27 claims
- 0873US11705252B2Vacuum chamber arrangement for charged particle beam generatorASML NETHERLANDS BV·Filed 2021·Granted Jul 18, 2023·0 cites·20 claims
- 0973US9653261B2Charged particle lithography system and beam generatorMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 16, 2017·2 cites·27 claims
- 1072US11094426B2Vacuum chamber arrangement for charged particle beam generatorASML NETHERLANDS BV·Filed 2020·Granted Aug 17, 2021·0 cites·20 claims
- 1164US2025285828A1Charged particle optical device, assessment apparatus, method of assessing a sampleASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1262US2024312756A1Platform for charged particle apparatus and components within a charged particle apparatusASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1361US10586625B2Vacuum chamber arrangement for charged particle beam generatorASML NETHERLANDS BV·Filed 2017·Granted Mar 10, 2020·0 cites·19 claims
- 1461US9905322B2Multi-electrode electron opticsMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted Feb 27, 2018·0 cites·18 claims
- 1561US9355751B2Multi-electrode stack arrangementMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted May 31, 2016·0 cites·27 claims
Join the waitlist — get patent alerts
Get an alert when Willem Henk Urbanus files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →