Inventor · disambiguated record
Woo Hyung Choi
Also filed as: CHOI WOO HYUNG
5 granted patents·15 pending applications·14 citations·filing 2005–2025
66Inventor score
Top patents by PatentIndex Score
20 records- 0180US7583953B2Method and device for subdividing data service charges in a networkKT CORP·Filed 2005·Granted Sep 1, 2009·14 cites·21 claims
- 0260US2025197140A1Substrate transfer apparatus using upper and lower magnetic levitation railsVM INC·Filed 2025·Application pending·0 cites
- 0354US2025149304A1System for controlling a slope and location of an upper electrodeVM INC·Filed 2024·Application pending·0 cites
- 0453US2025385114A1Substrate transfer apparatusVM INC·Filed 2024·Application pending·0 cites
- 0552US11538702B2Apparatus for monitoring an exchanging process of a semiconductor part and a method for the sameADAPTIVE PLASMA TECH CORP·Filed 2021·Granted Dec 27, 2022·0 cites·5 claims
- 0652US11315764B2Structure variable type of a plasma source coil and a method for controlling the sameADAPTIVE PLASMA TECH CORP·Filed 2020·Granted Apr 26, 2022·0 cites·1 claims
- 0752US2024096594A1System for etching with a plasmaADAPTIVE PLASMA TECH CORP·Filed 2022·Application pending·0 cites
- 0852US2025087511A1Method for determining a center position of a transferred semiconductor part and a system for determining the sameVM INC·Filed 2024·Application pending·0 cites
- 0952US2025087467A1Shallow etching process chamberVM INC·Filed 2024·Application pending·0 cites
- 1051US2025001583A1Substrate transfer apparatusVM INC·Filed 2024·Application pending·0 cites
- 1151US2024379397A1Substrate transfer apparatusVM INC·Filed 2024·Application pending·0 cites
- 1250US2025054792A1Substrate transfer apparatus including multilayer efemVM INC·Filed 2023·Application pending·0 cites
- 1350US2025029859A1Substrate transfer apparatus allowing movement between layersVM INC·Filed 2023·Application pending·0 cites
- 1449US11841284B2Particle trapping apparatus for preventing an error of a pressure measurementADAPTIVE PLASMA TECH CORP·Filed 2022·Granted Dec 12, 2023·0 cites·2 claims
- 1548US12293933B2Electrostatic chuck with multiple heater zonesADAPTIVE PLASMA TECH CORP·Filed 2021·Granted May 6, 2025·0 cites·3 claims
- 1646US2025299932A1Vertical fastener assembly for coupling an upper electrode of a plasma chamberVM INC·Filed 2025·Application pending·0 cites
- 1742US2025105031A1Spraying nozzle type of an apparatus for removing a residual gas on a waferVM INC·Filed 2024·Application pending·0 cites
- 1842US2025299925A1Substrate damage reducing type of an apparatus for etching an atomic layerVM INC·Filed 2025·Application pending·0 cites
- 1942US2021335651A1Apparatus for exchanging an article of a semi-conductor process and a method for exchanging the article using the sameADAPTIVE PLASMA TECH CORP·Filed 2020·Application pending·0 cites
- 2042US2025273518A1Method for producing a module by adhering parts made of different kinds of materials for a semiconductor etching processVM INC·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →