Inventor · disambiguated record
Wonwoong Chung
Also filed as: CHUNG WONWOONG
5 granted patents·7 pending applications·8 citations·filing 2015–2025
67Inventor score
Top patents by PatentIndex Score
12 records- 0184US9460935B2Method for fabricating semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Oct 4, 2016·5 cites·20 claims
- 0277US10134583B2Methods of forming a low-k dielectric layer and methods of fabricating a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 20, 2018·3 cites·20 claims
- 0358US2025372392A1Dry-etching method for silicon oxide layerSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0454US2024194604A1Material for metal line in semiconductor device, metal line in semiconductor device, and method for forming metal line in semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0554US2025323054A1Semiconductor device manufacturing method including plasma etching processSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0653US2024266291A1Material for metal line, metal line in semiconductor device and method for forming metal line in semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0749US2024294829A1Etching gas and etching method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0846US12183591B2Etching gas compositions, methods of forming micropatterns, and methods of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Dec 31, 2024·0 cites·16 claims
- 0946US2022260212A1Acetylene fluid supply package, system comprising the same and method of fabricating semiconductor device using the sameSINHA ASHWINI K·Filed 2022·Application pending·0 cites
- 1045US2025357120A1Manufacturing method of semiconductor device including plasma etching processSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 1142US12287064B2Gas container and deposition system including the sameSK SPECIALTY CO LTD·Filed 2020·Granted Apr 29, 2025·0 cites·11 claims
- 1239US10883173B2Gas storage cylinder, deposition system, and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jan 5, 2021·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →