Inventor · disambiguated record
Wolfgang Helle
Also filed as: HELLE WOLFGANG
4 granted patents·4 pending applications·258 citations·filing 1998–2007
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0196US6805139B1Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturingMATTSON TECH INC·Filed 2000·Granted Oct 19, 2004·138 cites·28 claims
- 0285US7361605B2System and method for removal of photoresist and residues following contact etch with a stop layer presentMATTSON TECH INC·Filed 2005·Granted Apr 22, 2008·12 cites·23 claims
- 0382US6536449B1Downstream surface cleaning processMATTSON TECH INC·Filed 1998·Granted Mar 25, 2003·61 cites·29 claims
- 0476US6379576B2Systems and methods for variable mode plasma enhanced processing of semiconductor wafersMATTSON TECH INC·Filed 1998·Granted Apr 30, 2002·47 cites·40 claims
- 0545US2007193602A1Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit ManufacturingSAVAS STEPHEN E·Filed 2007·Application pending·0 cites
- 0645US2007186953A1Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit ManufacturingSAVAS STEPHEN E·Filed 2007·Application pending·0 cites
- 0743US2005079717A1Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturingFiled 2004·Application pending·0 cites
- 0842US2005022839A1Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturingFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →