Inventor · disambiguated record
Wolfgang Scherm
Also filed as: SCHERM WOLFGANG
3 granted patents·1 pending application·0 citations·filing 2007–2025
40Inventor score
Top patents by PatentIndex Score
4 records- 0167US2025216797A1Optical element for a projection exposure system, optical system comprising same and projection exposure system comprising the optical element and/or the optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0261US12393119B2Optical system and lithography apparatusZEISS CARL SMT GMBH·Filed 2023·Granted Aug 19, 2025·0 cites·20 claims
- 0344US12058831B2Combined power electronics for an electric drive and a transmission control of the electric drive, inverter with such combined power electronics, electric drive with such an inverterZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 2021·Granted Aug 6, 2024·0 cites·20 claims
- 0436US8253947B2Device and method for measuring lithography masksHOF ALBRECHT·Filed 2007·Granted Aug 28, 2012·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →