Inventor · disambiguated record
Xiaoshu Chen
Also filed as: CHEN XIAOSHU
2 granted patents·7 citations·filing 2014–2019
52Inventor score
Top patents by PatentIndex Score
2 records- 0182US11181489B2Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scatteringLAM RES CORP·Filed 2019·Granted Nov 23, 2021·4 cites·13 claims
- 0271US9777372B2Methods for manufacturing nano-gap and angstrom-gap articlesUNIV MINNESOTA·Filed 2014·Granted Oct 3, 2017·3 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →